Experimental study of electrical breakdown in MEMS devices with micrometer scale gaps

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6884, Issue , 2008, Pages

  Carazzetti, P ^a   Renaud, Ph ^a   Shea, H R ^a  

^a EPFL   (Switzerland)

Author keywords

Aluminum; Argon; Breakdown voltage; Helium; Mean free path; MEMS; Nitrogen; Paschen curve; Planar interdigitated electrodes

Indexed keywords

ALUMINUM; MEMS; MICROMETERS; NITROGEN;

MEAN FREE PATH; PLANAR INTERDIGITATED ELECTRODES;

ELECTRIC BREAKDOWN;

EID: 41149149120     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.763195     Document Type: Conference Paper

References (20)

1. R. S. Dhariwal, J. M. Torres, and M. P. Y. Desmulliez, "Electric field breakdown at micrometre separations in air and nitrogen at atmospheric pressure", IEE Proc. Sci. Meas. Technol. 147 (5), pp. 261-265, 2000.
2. J.-M. Torres and R. S. Dhariwal, "Electric field breakdown at micrometre separations", Nanotechnology 10, pp. 102-107, 1999.
3. P. G. Slade and E. D. Taylor, "Electrical breakdown in atmospheric air between closely spaced (0.2 μm-40 μm) electrical contacts", IEEE Trans. Comp. Packaging Technol. 25 (3), pp. 390-396, 2002.
4. A. Wallash and L. Levit, "Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps", Proc. of SPIE 4980, pp. 87-96, 2003.
5. C.-H. Chen, J. A. Yeh, and P.-J. Wang, "Electrical breakdown phenomena for devices with micron separations", J. Micromech. Microeng. 16, pp. 1366-1373, 2006.
6. F. W. Strong, J. L. Skinner, P. M. Dentinger, and N. C. Tien, "Electrical breakdown across micron scale gaps in MEMS structures", Proc. of SPIE 6111, pp. 611103, 2006.
7. F. Paschen, "Über die zum Funkenübergang in Luft, Wasserstoff und Kohlensäure bei verschiedenen Drucken erforderliche Potentialdifferenz", Annalen der Physik 273 (5), pp. 69-96, 1889.
8. J. Townsend, Electricity in Gases, Oxford University Press, New York, 1915.
9. H. Jacobs and A. P. LaRocque, "Minimum sparking potentials of barium, magnesium, and aluminum in argon", J. Appl. Phys. 18, pp. 199-203, 1947.
10. L. Baars-Hibbe, P. Sichler, C. Schrader, N. Lucas, K.-H. Gericke and S. Büttgenbach, "High frequency glow discharges at atmospheric pressure with micro-structured electrode arrays", J. Phys. D: Appl. Phys. 38, pp. 510-517, 2005.
11. N. St. J. Braithwaite, "Introduction to gas discharges", Plasma Sources Sci. Technol. 9, pp. 517-527, 2000.
12. L. Baars-Hibbe, P. Sichler, C. Schrader, C. Gessner, K.-H. Gericke, and S. Büttgenbach, "Micro-structured electrode arrays: atmospheric pressure plasma processes and applications", Surf. Coat. Technol. 174-175, pp. 519-523, 2003.
13. 2 at atmospheric pressure using a variable radio frequency generator", Vacuum 80, pp. 1144-1148, 2006.
14. T. Ono, D. Y. Sim, and M. Esashi, "Micro-discharge and electric breakdown in a micro-gap", J. Micromech. Microeng. 10, pp. 445-451, 2000.
15. H. Schlemm and D. Roth, "Atmospheric plasma processing with microstructure electrodes and microplanar reactors", Surf Coat. Technol. 142-144, pp. 272-276, 2001.
16. P. Carazzetti, Ph. Renaud, and H. R. Shea, "Low-power hermetically sealed on-chip plasma light sources micromachined in glass," Tech. Dig. IEEE Int. Conf MEMS'08, January 13-18, Tucson, AZ, pp. 818-821, 2008.
17. M. A. Hassouba, F. F. Elakshar, and A. A. Garamoon, "Measurement of the breakdown potentials for different cathode materials in the Townsend regime", Fizika A 11 (2), pp. 81-90, 2002.
18. H. Jacobs and A. P. LaRocque, "The role of the cathode surface in sparking phenomena", Physical Review 74 (2), pp. 163-165, 1948.
19. L. H. Germer, "Electrical breakdown between close electrodes in air", J. Appl. Phys. 30 (1), pp. 46-51, 1959.
20. Y. P. Raizer, Gas Discharge Physics, Springer, Berlin, Germany, 1997.