Imprinted polymer stamps for UV-NIL

Microelectronic Engineering

Volumn 86, Issue 11, 2009, Pages 2293-2296

  Haatainen, T ^a   Makela T ^a   Ahopelto, J ^a   Kawaguchi, Y ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b ASAHI GLASS CO LTD   (Japan)

Author keywords

Nanoimprinting; Step and stamp; UV NIL

Indexed keywords

AFM; ANTI-ADHESIVE COATING; DOT ARRAY; FABRICATION PROCESS; HIGH FIDELITY; IMPRINTED POLYMERS; NANOIMPRINTING; QUARTZ PLATES; STEP AND STAMP; STEP-AND-REPEAT; TRANSPARENT POLYMER; UV-NIL;

OXIDE MINERALS; PLASMA ETCHING; PLASTIC COATINGS; QUARTZ; RESINS;

NANOIMPRINT LITHOGRAPHY;

EID: 69549095856     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.04.020     Document Type: Article

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