Fabrication of TiO2 nanotube thin films and their gas sensing properties

Journal of Sensors

Volumn 2009, Issue , 2009, Pages

  Li, Yongxiang ^a   Yu, Xiaofeng ^a   Yang, Qunbao ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC TITANIUM OXIDES; BARRIER LAYER THICKNESS; DYE SENSITIZED SOLAR CELL; GAS SENSING PROPERTIES; HYDROGEN GAS SENSING; LOW OPERATING TEMPERATURE; NANOPOROUS MORPHOLOGIES; NANOPOROUS THIN FILMS;

ANODIC OXIDATION; BIOLOGICAL MATERIALS; CHEMICAL DETECTION; CHEMICAL SENSORS; FABRICATION; GAS DETECTORS; GAS SENSING ELECTRODES; NANOTUBES; SOLAR CELLS; THIN FILMS; TITANIUM OXIDES;

FILM PREPARATION;

EID: 69449106492     PISSN: 1687725X     EISSN: 16877268     Source Type: Journal    
DOI: 10.1155/2009/402174     Document Type: Review

References (105)

1. Wu J. H., Wu X. L., Tang N., Mei Y. F., Bao X. M., Strong ultraviolet and violet photoluminescence from Si-based anodic porous alumina films Applied Physics A 2001 72 6 735 737
2. Gao T., Meng G., Tian Y., Sun S., Liu X., Zhang L., Photoluminescence of ZnO nanoparticles loaded into porous anodic alumina hosts Journal of Physics: Condensed Matter 2002 14 47 12651 12656
3. Kudrawiec R., Misiewicz J., Bryja L., Molchan I. S., Gaponenko N. V., Photoluminescence investigation of porous anodic alumina with spin-on europium-containing titania sol-gel films Journal of Alloys and Compounds 2002 341 1-2 211 213
4. Kudrawiec R., Podhorodecki A., Mirowska N., Photoluminescence investigation of europium-doped alumina, titania and indium sol-gel-derived films in porous anodic alumina Materials Science and Engineering B 2003 105 13 53 56
5. Gaponenko N. V., Molchan I. S., Thompson G. E., Photoluminescence of Eu-doped titania xerogel spin-on deposited on porous anodic alumina Sensors and Actuators A 2002 99 1-2 71 73
6. Gridnev A. E., Chernyshev V. V., Periodic oscillations of luminescence intensity at the formation of anodic oxides on aluminum in oxalic acid Russian Journal of Electrochemistry 2004 40 8 872 873
7. Yamamoto Y., Baba N., Tajima S., Colored materials and photoluminescence centers in anodic film on aluminum Nature 1981 289 572 574
8. Lopez H. A., Fauchet P. M., 1.54 m electroluminescence from erbium-doped porous silicon composites for photonic applications Physica Status Solidi A 2000 182 1 413 418
9. Zhao Y., Yang D., Zhou C., Yang Q., Que D., Photoluminescence properties of the composite of porous alumina and poly (2,5-dibutoxy-1,4 phenylenevinylene) Journal of Luminescence 2003 105 1 57 60
10. Jia R., Shen Y., Luo H., Chen X., Hu Z., Xue D., Photoluminescence properties of morin and lysozyme molecules absorbed on anodic porous alumina membrane Applied Surface Science 2004 233 14 343 351
11. Du Y., Cai W. L., Mo C. M., Chen J., Zhang L. D., Zhu X. G., Preparation and photoluminescence of alumina membranes with ordered pore arrays Applied Physics Letters 1999 74 20 2951 2953
12. Ling Z., Chen S., Wang J., Li Y., Fabrication and properties of anodic alumina humidity sensor with through-hole structure Chinese Science Bulletin 2008 53 2 183 187
13. Hoa N. D., Van Quy N., Cho Y., Kim D., An ammonia gas sensor based on non-catalytically synthesized carbon nanotubes on an anodic aluminum oxide template Sensors and Actuators B 2007 127 2 447 454
14. Ding D., Chen Z., Rajaputra S., Singh V., Hydrogen sensors based on aligned carbon nanotubes in an anodic aluminum oxide template with palladium as a top electrode Sensors and Actuators B 2007 124 1 12 17
15. Gorokh G., Mozalev A., Solovei D., Khatko V., Llobet E., Correig X., Anodic formation of low-aspect-ratio porous alumina films for metal-oxide sensor application Electrochimica Acta 2006 52 4 1771 1780
16. Mukherjee T., Hazra S. K., Basu S., Porous titania thin films grown by anodic oxidation for hydrogen sensors Materials and Manufacturing Processes 2006 21 3 247 251
17. Negishi N., Iyoda T., Hashimoto K., Fujishima A., Preparation of transparent TiO2 thin-film photocatalyst and its photocatalytic activity Chemistry Letters 1995 841 842
18. Lieber C., Nanowire-based photovoltaics build small powerful solar cells Advanced Materials Processes 2008 166 24
19. Gao Y., Nagai M., Chang T.-C., Shyue J.-J., Solution-derived ZnO nanowire array film as photoelectrode in dye-sensitized solar cells Crystal Growth and Design 2007 7 12 2467 2471
20. Enache-Pommer E., Boercker J. E., Aydil E. S., Electron transport and recombination in polycrystalline TiO2 nanowire dye-sensitized solar cells Applied Physics Letters 2007 91 12
21. Ku C.-H., Wu J.-J., Electron transport properties in ZnO nanowire array/nanoparticle composite dye-sensitized solar cells Applied Physics Letters 2007 91 9
22. Wu J.-J., Chen G.-R., Yang H.-H., Ku C.-H., Lai J.-Y., Effects of dye adsorption on the electron transport properties in ZnO-nanowire dye-sensitized solar cells Applied Physics Letters 2007 90 21
23. Bach U., Lupo D., Comte P., Solid-state dye-sensitized mesoporous TiO2 solar cells with high photon-to-electron conversion efficiencies Nature 1998 395 6702 583 585
24. Zhou P., Xue D., Luo H., Chen X., Fabrication, structure, and magnetic properties of highly ordered prussian blue nanowire arrays Nano Letters 2002 2 8 845 847
25. Yang S., Zhu H., Yu D., Jin Z., Tang S., Du Y., Preparation and magnetic property of Fe nanowire array Journal of Magnetism and Magnetic Materials 2000 222 1-2 97 100
26. Qin D. H., Cao L., Sun Q. Y., Huang Y., Li H. L., Fine magnetic properties obtained in FeCo alloy nanowire arrays Chemical Physics Letters 2002 358 5-6 484 488
27. Wang Y. W., Zhang L. D., Meng G. W., Peng X. S., Jin Y. X., Zhang J., Fabrication of ordered ferromagnetic-nonmagnetic alloy nanowire arrays and their magnetic property dependence on annealing temperature Journal of Physical Chemistry B 2002 106 10 2502 2507
28. Zhang X. Y., Wen G. H., Chan Y. F., Zheng R. K., Zhang X. X., Wang N., Fabrication and magnetic properties of ultrathin Fe nanowire arrays Applied Physics Letters 2003 83 16 3341 3343
29. Wang C. W., Peng Y., Pan S. L., Zhang H. L., Li H. L., Mossbauer spectrum studies of magnetic anisotropy of alpha-Fe nanowire arrays in alumina template Acta Physica Sinica 1999 48 2146 2150
30. Yuan X. Y., Wu G. S., Xie T., Lin Y., Zhang L. D., Self-assembly synthesis and magnetic studies of Co-P alloy nanowire arrays Nanotechnology 2004 15 1 59 61
31. Gao H., Mu C., Wang F., Field emission of large-area and graphitized carbon nanotube array on anodic aluminum oxide template Journal of Applied Physics 2003 93 9 5602 5605
32. Jeong S.-H., Lee K.-H., Fabrication of the aligned and patterned carbon nanotube field emitters using the anodic aluminum oxide nano-template on a Si wafer Synthetic Metals 2003 139 2 385 390
33. Tatarenko N. I., Mozalev A. M., Geometry and element composition of a nanoscale field emission array formed by self-organization in porous anodic aluminum oxide Solid-State Electronics 2001 45 6 1009 1016
34. Yu W. J., Cho Y. S., Choi G. S., Kim D., Patterned carbon nanotube field emitter using the regular array of an anodic aluminium oxide template Nanotechnology 2005 16 5 S291 S295
35. Chen P.-L., Chang J.-K., Kuo C.-T., Pan F.-M., Field emission of carbon nanotubes on anodic aluminum oxide template with controlled tube density Applied Physics Letters 2005 86 12 1 3
36. Kang D. W., Suh J. S., Fabrication temperature effect of the field emission from closed and open tip carbon nanotube arrays fabricated on anodic aluminum oxide films Journal of Applied Physics 2004 96 9 5234 5238
37. Jeong S.-H., Lee K.-H., Field emission properties of low-density carbon nanotubes prepared on anodic aluminum-oxide template Journal of the Korean Physical Society 2004 45 2 L252 L255
38. Cho S. I., Kwon W. J., Choi S.-J., Nanotube-based ultrafast electrochromic display Advanced Materials 2005 17 2 171 175
39. Hoyer P., Formation of a titanium dioxide nanotube array Langmuir 1996 12 6 1411 1413
40. Kasuga T., Hiramatsu M., Hoson A., Sekino T., Niihara K., Formation of titanium oxide nanotube Langmuir 1998 14 12 3160 3163
41. Zhang M., Bando Y., Wada K., Sol-gel template preparation of TiO2 nanotubes and nanorods Journal of Materials Science Letters 2001 20 2 167 170
42. Zwilling V., Aucouturier M., Darque-Ceretti E., Anodic oxidation of titanium and TA6V alloy in chromic media. An electrochemical approach Electrochimica Acta 1999 45 6 921 929
43. Zwilling V., Darque-Ceretti E., Boutry-Forveille A., David D., Perrin M. Y., Aucouturier M., Structure and physicochemistry of anodic oxide films on titanium and TA6V alloy Surface and Interface Analysis 1999 27 7 629 637 (Pubitemid 129585170)
44. Gong D., Grimes C. A., Varghese O. K., Titanium oxide nanotube arrays prepared by anodic oxidation Journal of Materials Research 2001 16 12 3331 3334
45. Mor G. K., Varghese O. K., Paulose M., Mukherjee N., Grimes C. A., Fabrication of tapered, conical-shaped titania nanotubes Journal of Materials Research 2003 18 11 2588 2593
46. Ruan C., Paulose M., Varghese O. K., Mor G. K., Grimes C. A., Fabrication of highly ordered TiO2 nanotube arrays using an organic electrolyte Journal of Physical Chemistry B 2005 109 33 15754 15759 (Pubitemid 41321490)
47. Mor G. K., Carvalho M. A., Varghese O. K., Pishko M. V., Grimes C. A., A room-temperature TiO2 -nanotube hydrogen sensor able to self-clean photoactively from environmental contamination Journal of Materials Research 2004 19 2 628 634
48. Mor G. K., Varghese O. K., Paulose M., Grimes C. A., A self-cleaning, room-temperature titania-nanotube hydrogen gas sensor Sensor Letters 2003 1 42 46
49. Mor G. K., Shankar K., Paulose M., Varghese O. K., Grimes C. A., Enhanced photocleavage of water using titania nanotube arrays Nano Letters 2005 5 1 191 195
50. Beranek R., Hildebrand H., Schmuki P., Self-organized porous titanium oxide prepared in H2SO4/HF electrolytes Electrochemical and Solid-State Letters 2003 6 3 B12 B14
51. Macak J. M., Tsuchiya H., Schmuki P., High-aspect-ratio TiO2 nanotubes by anodization of titanium Angewandte Chemie International Edition 2005 44 14 2100 2102
52. Macak J. M., Sirotna K., Schmuki P., Self-organized porous titanium oxide prepared in Na2SO4/NaF electrolytes Electrochimica Acta 2005 50 18 3679 3684
53. Bauer S., Kleber S., Schmuki P., TiO 2 nanotubes: tailoring the geometry in H3PO4/HF electrolytes Electrochemistry Communications 2006 8 8 1321 1325
54. Cai Q., Paulose M., Varghese O. K., Grimes C. A., The effect of electrolyte composition on the fabrication of self-organized titanium oxide nanotube arrays by anodic oxidation Journal of Materials Research 2005 20 1 230 236
55. Mor G. K., Varghese O. K., Paulose M., Shankar K., Grimes C. A., A review on highly ordered, vertically oriented TiO2 nanotube arrays: fabrication, material properties, and solar energy applications Solar Energy Materials and Solar Cells 2006 90 14 2011 2075
56. Macak J. M., Schmuki P., Anodic growth of self-organized anodic TiO2 nanotubes in viscous electrolytes Electrochimica Acta 2006 52 3 1258 1264 (Pubitemid 44550109)
57. Macak J. M., Tsuchiya H., Taveira L., Aldabergerova S., Schmuki P., Smooth anodic TiO2 nanotubes Angewandte Chemie International Edition 2005 44 45 7463 7465
58. Taveira L. V., Macak J. M., Tsuchiya H., Dick L. F. P., Schmuki P., Initiation and growth of self-organized TiO2 nanotubes anodically formed in NH4F/(NH4)2SO4 electrolytes Journal of the Electrochemical Society 2005 152 10 B405 B410
59. Richter C., Wu Z., Panaitescu E., Willey R. J., Menon L., Ultrahigh-aspect-ratio titania nanotubes Advanced Materials 2007 19 7 946 948
60. Tsuchiya H., Macak J. M., Taveira L., Self-organized TiO2 nanotubes prepared in ammonium fluoride containing acetic acid electrolytes Electrochemistry Communications 2005 7 6 576 580
61. Ruan C., Paulose M., Varghese O. K., Grimes C. A., Enhanced photoelectrochemical-response in highly ordered TiO2 nanotube-arrays anodized in boric acid containing electrolyte Solar Energy Materials and Solar Cells 2006 90 9 1283 1295
62. Varghese O. K., Gong D., Paulose M., Grimes C. A., Dickey E. C., Crystallization and high-temperature structural stability of titanium oxide nanotube arrays Journal of Materials Research 2003 18 1 156 165
63. Kumar K.-N. P., Keizer K., Burggraaf A. J., Okubo T., Nagamoto H., Textural evolution and phase transformation in titania membranes: II supported membranes Journal of Materials Chemistry 1993 3 11 1151 1159
64. Varghese O. K., Paulose M., Shankar K., Mor G. K., Grimes C. A., Water-photolysis properties of micron-length highly-ordered titania nanotube-arrays Journal of Nanoscience and Nanotechnology 2005 5 7 1158 1165
65. Varghese O. K., Grimes C. A., Appropriate strategies for determining the photoconversion efficiency of water photoelectrolysis cells: a review with examples using titania nanotube array photoanodes Solar Energy Materials and Solar Cells 2008 92 4 374 384
66. Mor G. K., Prakasam H. E., Varghese O. K., Shankar K., Grimes C. A., Vertically oriented Ti-Fe-O nanotube array films: toward a useful material architecture for solar spectrum water photoelectrolysis Nano Letters 2007 7 8 2356 2364
67. Shankar K., Mor G. K., Prakasam H. E., Highly-ordered TiO2 nanotube arrays up to 220 m in length: use in water photoelectrolysis and dye-sensitized solar cells Nanotechnology 2007 18 6 11
68. Paulose M., Mor G. K., Varghese O. K., Shankar K., Grimes C. A., Visible light photoelectrochemical and water-photoelectrolysis properties of titania nanotube arrays Journal of Photochemistry and Photobiology A 2006 178 1 8 15
69. Mor G. K., Shankar K., Paulose M., Varghese O. K., Grimes C. A., Use of highly-ordered TiO2 nanotube arrays in dye-sensitized solar cells Nano Letters 2006 6 2 215 218 (Pubitemid 43382954)
70. Mor G. K., Varghese O. K., Paulose M., Grimes C. A., Transparent highly ordered TiO2 nanotube arrays via anodization of titanium thin films Advanced Functional Materials 2005 15 8 1291 1296
71. Paulose M., Shankar K., Varghese O. K., Mor G. K., Hardin B., Grimes C. A., Backside illuminated dye-sensitized solar cells based on titania nanotube array electrodes Nanotechnology 2006 17 5 1446 1448
72. Mor G. K., Varghese O. K., Paulose M., Ong K. G., Grimes C. A., Fabrication of hydrogen sensors with transparent titanium oxide nanotube-array thin films as sensing elements Thin Solid Films 2006 496 1 42 48
73. Paulose M., Varghese O. K., Mor G. K., Grimes C. A., Ong K. G., Unprecedented ultra-high hydrogen gas sensitivity in undoped titania nanotubes Nanotechnology 2006 17 2 398 402
74. Varghese O. K., Gong D., Paulose M., Ong K. G., Dickey E. C., Grimes C. A., Extreme changes in the electrical resistance of titania nanotubes with hydrogen exposure Advanced Materials 2003 15 7-8 624 627
75. Varghese O. K., Gong D., Paulose M., Ong K. G., Grimes C. A., Hydrogen sensing using titania nanotubes Sensors and Actuators B 2003 93 13 338 344
76. Shimizu Y., Kuwano N., Hyodo T., Egashira M., High H2 sensing performance of anodically oxidized TiO2 film contacted with Pd Sensors and Actuators B 2002 83 13 195 201
77. Ghicov A., Tsuchiya H., Hahn R., Macak J. M., Munoz A. G., Schmuki P., TiO 2 nanotubes: H+ insertion and strong electrochromic effects Electrochemistry Communications 2006 8 4 528 532
78. Yang B., Uchida M., Kim H.-M., Zhang X., Kokubo T., Preparation of bioactive titanium metal via anodic oxidation treatment Biomaterials 2004 25 6 1003 1010
79. Oh H.-J., Lee J.-H., Jeong Y., Kim Y.-J., Chi C.-S., Microstructural characterization of biomedical titanium oxide film fabricated by electrochemical method Surface and Coatings Technology 2005 198 13 247 252
80. Chu S.-Z., Inoue S., Wada K., Hishita S., Kumshima K., Self-organized nanoporous anodic titania films and ordered titania nanodots/nanorods on glass Advanced Functional Materials 2005 15 8 1343 1349
81. Yu X., Li Y., Ge W., Yang Q., Zhu N., Kalantar-Zadeh K., Formation of nanoporous titanium oxide films on silicon substrates using an anodization process Nanotechnology 2006 17 3 808 814
82. Premchand Y. D., Djenizian T., Vacandio F., Knauth P., Fabrication of self-organized TiO2 nanotubes from columnar titanium thin films sputtered on semiconductor surfaces Electrochemistry Communications 2006 8 12 1840 1844
83. Macak J. M., Tsuchiya H., Berger S., Bauer S., Fujimoto S., Schmuki P., On wafer TiO2 nanotube-layer formation by anodization of Ti-films on Si Chemical Physics Letters 2006 428 46 421 425
84. Raja K. S., Misra M., Paramguru K., Formation of self-ordered nano-tubular structure of anodic oxide layer on titanium Electrochimica Acta 2005 51 1 154 165
85. Vitiello R. P., Macak J. M., Ghicov A., Tsuchiya H., Dick L. F. P., Schmuki P., N-doping of anodic TiO2 nanotubes using heat treatment in ammonia Electrochemistry Communications 2006 8 4 544 548
86. Ghicov A., Macak J. M., Tsuchiya H., Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes Nano Letters 2006 6 5 1080 1082
87. Mukherjee N., Paulose M., Varghese O. K., Mor G. K., Grimes C. A., Fabrication of nanoporous tungsten oxide by galvanostatic anodization Journal of Materials Research 2003 18 10 2296 2299
88. Tsuchiya H., Macak J. M., Sieber I., Self-organized porous WO3 formed in NaF electrolytes Electrochemistry Communications 2005 7 3 295 298
89. Berger S., Tsuchiya H., Ghicov A., Schmuki P., High photocurrent conversion efficiency in self-organized porous WO3 Applied Physics Letters 2006 88 20
90. Choi J., Park Y.-B., Scherer A., Fabrication of a tungsten master stamp using self-ordered porous alumina Nanotechnology 2005 16 9 1655 1659
91. de Tacconi N. R., Chenthamarakshan C. R., Yogeeswaran G., Nanoporous TiO2 and WO3 films by anodization of titanium and tungsten substrates: influence of process variables on morphology and photoelectrochemical response Journal of Physical Chemistry B 2006 110 50 25347 25355
92. Sieber I., Hildebrand H., Friedrich A., Schmuki P., Formation of self-organized niobium porous oxide on niobium Electrochemistry Communications 2005 7 1 97 100
93. Choi J., Lim J. H., Lee S. C., Chang J. H., Kim K. J., Cho M. A., Porous niobium oxide films prepared by anodization in HF/H3PO4 Electrochimica Acta 2006 51 25 5502 5507
94. Choi J., Lim J. H., Lee J., Kim K. J., Porous niobium oxide films prepared by anodization-annealing-anodization Nanotechnology 2007 18 5 6
95. Kovacs K., Kiss G., Stenzel M., Zillgen H., Anodic oxidation of niobium sheets and porous bodies heat-treatment of the Nb/Nb-oxide system Journal of the Electrochemical Society 2003 150 8 B361 B366
96. Tsuchiya H., Macak J. M., Sieber I., Schmuki P., Self-organized high-aspect-ratio nanoporous zirconium oxides prepared by electrochemical anodization Small 2005 1 7 722 725
97. Tsuchiya H., Schmuki P., Thick self-organized porous zirconium oxide formed in H2SO4/NH4F electrolytes Electrochemistry Communications 2004 6 11 1131 1134
98. Yasuda K., Schmuki P., Electrochemical formation of self-organized zirconium titanate nanotube multilayers Electrochemistry Communications 2007 9 4 615 619 (Pubitemid 46507906)
99. Yasuda K., Schmuki P., Control of morphology and composition of self-organized zirconium titanate nanotubes formed in (NH4)2SO4/NH4F electrolytes Electrochimica Acta 2007 52 12 4053 4061
100. Tsuchiya H., Schmuki P., Self-organized high aspect ratio porous hafnium oxide prepared by electrochemical anodization Electrochemistry Communications 2005 7 1 49 52
101. Shobha T., Sarma C. S. N., Sastry K. S., Anjaneyulu C. H., Anodization of hafnium in phosphate baths: radio tracer studies Bulletin of Electrochemistry 2001 17 11 519 522
102. Chu S.-Z., Wada K., Inoue S., Todoroki S.-I., Takahashi Y. K., Hono K., Fabrication and characteristics of ordered Ni nanostructures on glass by anodization and direct current electrodeposition Chemistry of Materials 2002 14 11 4595 4602
103. Macak J. M., Tsuchiya H., Ghicov A., Schmuki P., Dye-sensitized anodic TiO2 nanotubes Electrochemistry Communications 2005 7 11 1133 1137
104. Lee W.-J., Alhoshan M., Smyrl W. H., Titanium dioxide nanotube arrays fabricated by anodizing processes Journal of the Electrochemical Society 2006 153 11 B499 B505
105. Zhu K., Neale N. R., Miedaner A., Frank A. J., Enhanced charge-collection efficiencies and light scattering in dye-sensitized solar cells using oriented TiO2 nanotubes arrays Nano Letters 2007 7 1 69 74