Fabrication and properties of anodic alumina humidity sensor with through-hole structure

Chinese Science Bulletin

Volumn 53, Issue 2, 2008, Pages 183-187

  Ling, ZhiYuan ^a   Chen, ShuoShuo ^a   Wang, JinChi ^a   Li, Yi ^a  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Anodic aluminum oxide; Humidity sensor; Nanopore electrode

Indexed keywords

EID: 38949173136     PISSN: 10016538     EISSN: 18619541     Source Type: Journal    
DOI: 10.1007/s11434-008-0008-z     Document Type: Article

References (17)

1. Ansbacher F, Jason A C. Effects of water vapour on the electrical properties of anodized aluminium. Nature, 1953, 171: 177-178
2. Varghese O K, Grimes C A. Metal oxide nanoarchitectures for environmental sensing. J Nanosci Nanotechn, 2003, 3(4): 277-293
3. Morimoto T, Nagar M, Tokuda F. Relation between the amounts of chemisorbed and physisorbed water on metal oxides. J Phys Chem, 1969, 73: 243-248
4. Moretti L, De Stefano L, Rendino I. Quantitative analysis of capillary condensation in fractal-like porous silicon nanostructures. J Appl Phys, 2007, 101: 024309
5. Choi J, Luo Y, Ralf B. Wehrspohn R B, et al. Perfect two-dimensional porous alumina photonic crystals with duplex oxide layers. J Appl Phys, 2003, 94(4): 4757-4762
6. Jessensky O, Muller F, Gosele U. Self-organized formation of hexagonal pore arrays in anodic alumina. Appl Phys Lett, 1998, 72(10): 1173-1175
7. Masuda H, Yamada H, Satoh M, et al. Highly ordered nanochannel array architecture in anodic alumina. Appl Phys Lett, 1997, 71(19): 2770-2772
8. Khanna V K, Nahar R K. Effect of moisture on the dielectric properties of porous alumina films. Sensor Actuat, 1984, 5: 187-188
9. Traversa E. Ceramic sensors for humidity detection-the state of the art and future development. Sensor Actuat B, 1995, 23: 135-156
10. 3 humidity sensor. Sensor Actuat B, 1998, 46: 35-41
11. Nahar R K. Study of the performance degradation of thin film aluminum oxide sensor at high humidity. Sensor Actuat B, 2000, 63: 49-54
12. Varghese O K, Gong D W, Paulose M, et al. Highly ordered nanoporous alumina films: Effect of pore size and uniformity on sensing performance. J Mater Res, 2002, 17(5): 1162-1171
13. Zhao X F, Fang Y. Metal nano-hole array copied from AAO template. Acta Phys Sin, 206,55: 3785-3788
14. Ding G Q, Shen W Z, Zheng M J, et al. Synthesis of ordered large-scale ZnO nanopore arrays. Appl Phys Lett, 2006, 88: 103106
15. Lazarouk S, Katsouba S, Demianovich A, et al. Reliability of built in aluminum interconnection with low-ε ielectric based on porous anodic alumina. Solid-State Electron, 2000, 44: 815-818
16. Wang Y C, Leu I C, Hon M H. Dielectric property and structure of anodic alumina template and their effects on the electrophoretic deposition characteristics of ZnO nanowire arrays. J Appl Phys, 2004, 95(3): 1444-1449
17. Faia P M, Furtado C S, Ferreira A J. AC impedance spectroscopy: A new equivalent circuit for titania thick film humidity sensors. Sensor Actuat B, 2005, 107: 353-359