Investigation on reaction pathways for ZnO formation from diethylzinc and water during chemical vapor deposition

Bulletin of the Korean Chemical Society

Volumn 30, Issue 7, 2009, Pages 1573-1578

  Kim, Young Seok ^a   Won, Yong Sun ^b  

^a University of Massachusetts   (United States)

^b Samsung Electro Mechanics   (South Korea)

Author keywords

CVD; Diethylzinc; Reaction pathway; Water; ZnO

Indexed keywords

COMPUTATIONAL STUDIES; CVD; DENSITY FUNCTIONAL THEORY CALCULATIONS; DIETHYLZINC; GAS-PHASE REACTIONS; GEOMETRY OPTIMIZATION; IN-SITU; INITIAL STAGES; METALORGANIC CHEMICAL VAPOR DEPOSITION; MOCVD REACTOR; REACTION PATHWAY; REACTION PATHWAYS; REACTION PRODUCTS; RELEVANT REACTIONS; THERMAL DECOMPOSITIONS; ZNO; ZNO FILMS;

DENSITY FUNCTIONAL THEORY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANIC CHEMICALS; ORGANOMETALLICS; PYROLYSIS; SEMICONDUCTING ZINC COMPOUNDS; WATER VAPOR; ZINC OXIDE;

ZINC;

EID: 69249180175     PISSN: 02532964     EISSN: 12295949     Source Type: Journal    
DOI: 10.5012/bkcs.2009.30.7.1573     Document Type: Article

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