Physical models for coupled electromechanical analysis of silicon nanoelectromechanical systems

Journal of Applied Physics

Volumn 97, Issue 11, 2005, Pages

  Tang, Zhi ^a   Xu, Yang ^a   Li, Gang ^a   Aluru, N R ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL ENERGY DOMAINS; MOLECULAR-DYNAMICS (MD) SIMULATIONS; NANOELECTROMECHANICAL SYSTEMS (NEMS); SILICON NANOSWITCHES;

COMMUNICATION SYSTEMS; COMPUTER SIMULATION; ENERGY GAP; INFORMATION TECHNOLOGY; MOLECULAR DYNAMICS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; QUANTUM THEORY; SILICON; VAN DER WAALS FORCES;

MICROELECTROMECHANICAL DEVICES;

EID: 20544453554     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1897483     Document Type: Article

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