Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure

Microsystem Technologies

Volumn 14, Issue 2, 2008, Pages 235-240

  Nabian, Adel ^a   Rezazadeh, Ghader ^a   Haddad Derafshi, Mohammadali ^a   Tahmasebi, Ahmadali ^a  

^a URMIA UNIVERSITY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; HYDROSTATIC PRESSURE; MEMS; MICROSENSORS; NONLINEAR EQUATIONS;

ACTUATION MECHANISM; ELECTROSTATIC PRESSURE; MICRO PRESSURE SENSORS;

MICROSYSTEMS;

EID: 35148828460     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0425-y     Document Type: Article

References (11)

1. Gupta RK (1993) Electrostatic pull-in test structure design for in-situ mechanical property measurement of microelectromechanical systems (MEMS). Thesis for degree of Doctor of Philosophy, S. M. Massachusetts Institute of Technology
2. Michalicek MA, Comtois JH, Schriner HK (1998) Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process. Proc SPIE 3276:48-55
3. Nathanson HC, Newell WE, Wickstrom RA, Davis JR (1967) The resonant gate transistor. IEEE Trans Elect Devices 14:117-133
4. Osterberg P (1995) Electrostatically actuated microelectromechanical test structures for material property measurement. PhD thesis, MIT
5. Rezazadeh Gh, Tahmasebi A (2006) Eliminating of the residual stresses effect in the fixed-fixed end type MEM switches by piezoelectric layers. J Sens Transducers 66(4):534-542
6. Rezazadeh Gh, Tahmasebi A, Zubtsov M (2006) Application of piezoelectric layers in electrostatic MEM actuators, controlling of pull-in voltage. J Microsyst Technol 12(12):1163-1170
7. Sadeghian H, Rezazadeh Gh, Abbaspour E, Tahmasebi A, Hosainzadeh I (2006) The effect of residual stress on pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area. Proc IEEE-NEMS, Zuhai 18-21
8. Soleymani P, Sadeghian H, Tahmasebi A, Rezazadeh Gh (2006) Pull-in instability investigation of circular micro pump subjected to nonlinear electrostatic force. Sens Transducers J 69(7):622-628
9. Shi W (1999) The important applied field of microtechnology nami-technology microsensor. J Sens 12:70-72
10. Swyt DA (1995) Generic technology, measurement and standards issues in micromachining and microfabrication. Proc SPIE 2640:16-21
11. Taylor GI (1968) The coalescence of closely spaced drops when they are at different electric potentials. Proc Roy Soc A 306:423-434