Failure of Au RF-MEMS switches subjected to dynamic loading

Sensors and Actuators, A: Physical

Volumn 154, Issue 1, 2009, Pages 140-148

  Kimberley, J ^a   Cooney, R S ^a   Lambros, J ^a   Chasiotis, I ^a   Barker, N S ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Virginia   (United States)

Author keywords

Dynamic failure; High strain rate; Hopkinson bar; Pulsed laser; RF MEMS

Indexed keywords

DYNAMIC FAILURE; HIGH STRAIN RATE; HOPKINSON BAR; PULSED LASER; RF-MEMS;

ACCELERATION; BARS (METAL); DROPS; LASERS; LOADING; MEMS; MICROELECTROMECHANICAL DEVICES; OXIDE MINERALS; PULSE GENERATORS; PULSED LASER APPLICATIONS; QUARTZ; SUBSTRATES; TOWERS;

STRAIN RATE;

EID: 68849103204     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.06.004     Document Type: Article

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