Critical issues in the formation of quantum computer test structures by ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 267, Issue 16, 2009, Pages 2563-2566

  Schenkel, T ^a   Lo, C C ^b   Weis, C D ^a   Schuh, A ^a   Persaud, A ^a   Bokor, J ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Highly charged ions; Ion implantation; Quantum computing

Indexed keywords

ANTIMONY IONS; BISMUTH ION; CRITICAL ISSUES; DOPANT ATOMS; FLUENCES; HIGHLY CHARGED IONS; ION CHARGE STATE; LOW ENERGY IMPLANTATION; QUANTUM COMPUTING; READOUT MECHANISM; SINGLE ION; SINGLE-ATOM DEVICES; SPIN DEPENDENT TRANSPORT;

ANTIMONY; ATOMS; BISMUTH; CHARGED PARTICLES; COMPUTER SCIENCE; CRYSTAL ATOMIC STRUCTURE; DEPTH PROFILING; DOPING (ADDITIVES); ION BOMBARDMENT; PHOSPHORUS; QUANTUM COMPUTERS; QUANTUM THEORY; SECONDARY ION MASS SPECTROMETRY; SILICON COMPOUNDS; SILICON OXIDES; SPIN DYNAMICS;

ION IMPLANTATION;

EID: 68349144430     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2009.05.061     Document Type: Article

References (17)

1. Kane B.E. Nature 393 (1998) 133
2. Lo C.C., Bokor J., Schenkel T., He J., Tyryshkin A.M., and Lyon S.A. Appl. Phys. Lett. 92 (1997) 109908
3. Angus S.J., Ferguson A.J., Dzurak A.S., and Clark R.G. NanoLetters 7 (2007) 2051
4. Morley G.W., McCamey D.R., Seipel H.A., Brunel L.-C., van Tol J., and Boehme C. Phys. Rev. Lett. 101 (2008) 207602
5. McCamey D.R., Huebl H., Brandt M.S., Hutchison W.D., McCallum J.C., Clark R.G., and Hamilton A.R. Appl. Phys. Lett. 89 (2006) 182115
6. van Beveren L.H.W., Huebl H., McCamey D.R., Duty T., Ferguson A.J., Clark R.G., and Brandt M.S. Appl. Phys. Lett. 93 (2008) 072102
7. S. A. Lyon, A. M. Tyryshkin, private communication.
8. Sarovar M., Young K.C., Schenkel T., and Whaley K.B. Phys. Rev. B 78 (2008) 245302
9. Morton J.J.L., Tyryshkin A.M., Brown R.M., Shankar S., Lovett B.W., Ardavan A., Schenkel T., Haller E.E., Ager J.W., and Lyon S.A. Nature 455 (2008) 1085
10. Batra A., Weis C.D., Reijonen J., Persaud A., Schenkel T., Cabrini S., Lo C.C., and Bokor J. Appl. Phys. Lett. 91 (2007) 193502
11. Schenkel T., Persaud A., Kraemer A., McDonald J.W., Holder J.P., Hamza A.V., and Schneider D.H. Rev. Sci. Instr. 73 (2002) 663
12. Persaud A., Park S.J., Liddle J.A., Rangelow I.W., Bokor J., Keller R., Allen F.I., Schneider D.H., and Schenkel T. Quant. Info. Proc. 3 (2004) 233
13. Fahey M., Griffin P.B., and Plummer J.D. Rev. Mod. Phys. 61 (1989) 289
14. Dabrowski J., Müssig H.-J., Zavodinsky V., Baierle R., and Caldas M.J. Phys. Rev. B 65 (2002) 245305
15. Schenkel T., Liddle J.A., Persaud A., Tyryshkin A.M., Lyon S.A., de Sousa R., Whaley K.B., Bokor J., Shangkuan J., and Chakarov I. Appl. Phys. Lett. 88 (2006) 112101
16. Briere M.A., Schenkel T., Schneider D.H., Bauer P., and Arnau A. Phys. Scr. T73 (1997) 324
17. Schenkel T., Briere M.A., Barnes A.V., Hamza A.V., Bethge K., Schmidt-Böcking H., and Schneider D.H. Phys. Rev. Lett. 79 (1997) 2030