SCOPUS 정보 검색 플랫폼

Volumn 163, Issue , 2009, Pages

Investigation of ions emitted from a tin fuelled laser produced plasma source

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Indexed keywords

EID: 67650653738 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/163/1/012116 Document Type: Article

Times cited : (3)

References (9)

1
- 65549093343
- Itrs reports lithography edn 2007
- International Technology Roadmap for Semiconductors Webpage. Itrs reports lithography edn 2007
- International Technology Roadmap for Semiconductors Webpage

2
- 0942268376
- Extreme ultraviolet emission spectra of highly ionized xenon and their comparison with model calculations
- Bowering N, M Martins, WN Partlo and I V Fomenkov 2004 Extreme ultraviolet emission spectra of highly ionized xenon and their comparison with model calculations J. Appl. Phys. 95 51-52
- (2004) J. Appl. Phys. , vol.95 , pp. 51-52
- Bowering, N.¹ Martins, M.² Partlo, W.N.³ Fomenkov, I.V.⁴

3
- 33646879868
- 13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources
- Hayden P, A Cummings, N Murphy, G O'Sullivan, P Sheridan, J White and P Dunne 2006 13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources J. Appl. Phys. 99 093302
- (2006) J. Appl. Phys. , vol.99 , Issue.9 , pp. 093302
- Hayden, P.¹ Cummings, A.² Murphy, N.³ O'Sullivan, G.⁴ Sheridan, P.⁵ White, J.⁶ Dunne, P.⁷

4
- 29744455610
- 13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources
- Higashiguchi T, C Rajyaguru, N Dojyo, Y Taniguchi, K Sakita, W Sasaki and S Kubodera 2005 13.5 nm extreme ultraviolet emission from tin based laser produced plasma sources Rev. Sci. Instrum. 76 126102
- (2005) Rev. Sci. Instrum. , vol.76 , Issue.12 , pp. 126102
- Higashiguchi, T.¹ Rajyaguru, C.² Dojyo, N.³ Taniguchi, Y.⁴ Sakita, K.⁵ Sasaki, W.⁶ Kubodera, S.⁷

5
- 33645696841
- Ion debris characterization from a z-pinch extreme ultraviolet light source
- Antonsen E, K C Thompson, M R Hendricks, D A Alman, B E Jurczyk and D N Ruzic 2006 Ion debris characterization from a z-pinch extreme ultraviolet light source J. Appl. Phys. 99 063301
- (2006) J. Appl. Phys. , vol.99 , Issue.6 , pp. 063301
- Antonsen, E.¹ Thompson, K.C.² Hendricks, M.R.³ Alman, D.A.⁴ Jurczyk, B.E.⁵ Ruzic, D.N.⁶

6
- 24644467189
- Takenoshita K, C Koay, S Teerawattansook and M Richardson 2005 Mitigation of fast ions from laser produced sn plasma for extreme ultraviolet source Emerging Lithographic Technologies IX Proceedings of SPIE Vol. 5751
- (2005) Mitigation of Fast Ions from Laser Produced Sn Plasma for Extreme Ultraviolet Source
- Takenoshita, K.¹ Koay, C.² Teerawattansook, S.³ Richardson, M.⁴

7
- 84960259042
- Bakshi V 2006 EUV sources for lithography SPIE Press
- (2006)
- Bakshi, V.¹

8
- 23944457611
- Debris mitigation in laser-produced tin plume using magnetic field
- Harilal S S, B O'Shay and M Tillack 2005 Debris mitigation in laser-produced tin plume using magnetic field J. Appl. Phys. 98 036102
- (2005) J. Appl. Phys. , vol.98 , Issue.3 , pp. 036102
- Harilal, S.S.¹ O'Shay, B.² Tillack, M.³

9
- 33947361188
- Morris O, P Hayden, P Dunne, F O'Reilly, G O'Sullivan, E Sokell, E L Antonsen, S N Srivastava, K C Thompson and D N Ruzic 2007 Determination of charge state, energy and angular distributions of tin ions emitted from laser produced plasma based euv sources J. Phys.: Conf. Ser vol 58 p 391-294
- (2007) Determination of Charge State, Energy and Angular Distributions of Tin Ions Emitted from Laser Produced Plasma Based Euv Sources , vol.58 , pp. 391-294
- Morris, O.¹ Hayden, P.² Dunne, P.³ O'Reilly, F.⁴ O'Sullivan, G.⁵ Sokell, E.⁶ Antonsen, E.L.⁷ Srivastava, S.N.⁸ Thompson, K.C.⁹ Ruzic, D.N.¹⁰

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