PECVD of fluorocarbon coatings from hexafluoropropylene oxide: Glow vs. afterglow

Chemical Vapor Deposition

Volumn 15, Issue 4-6, 2009, Pages 95-100

  Intranuovo, Francesca ^a   Sardella, Eloisa ^b   Rossini, Pasqua ^a   D'Agostino, Riccardo ^a   Favia, Pietro ^a  

^a UNIVERSITY OF BARI   (Italy)

^b CNR   (Italy)

Author keywords

Afterglow; Coatings; Hexafluoropropylene oxide; Microstructures; PECVD

Indexed keywords

AFTERGLOW; DEPOSITION TIME; F/C RATIO; FILM PROPERTIES; FLUOROCARBON COATINGS; HEXAFLUOROPROPYLENE OXIDE; MORPHOLOGICAL FEATURES; NANO-STRUCTURING; PECVD; PLASMA PARAMETER; RADIO FREQUENCIES; REPRODUCIBILITY; SUPERHYDROPHOBIC; WETABILITY;

GLOW DISCHARGES; HYDROPHOBICITY; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

COATINGS;

EID: 67650539595     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200806755     Document Type: Article

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