Sputtering of silicon by a beamlet of electrosprayed nanodroplets

Applied Surface Science

Volumn 255, Issue 20, 2009, Pages 8556-8561

  Gamero Castaño, Manuel ^a   Mahadevan, Mahesh ^a  

^a University of California at Irvine   (United States)

Author keywords

Electrospray atomization; Ion beam; Nanodroplet; Sputtering

Indexed keywords

ION BEAMS; IONS; KINETIC ENERGY; MOLECULES; PROJECTILES; SILICON WAFERS;

ACCELERATION VOLTAGES; ADVANCED FABRICATION; ELECTROSPRAYS; ELEMENTARY CHARGE; NANODROPLET; NEUTRAL MOLECULES; ORDERS OF MAGNITUDE; SPUTTERING RATE;

SPUTTERING;

EID: 67650472578     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.06.018     Document Type: Article

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