MD simulation study of the sputtering process by high-energy gas cluster impact

Applied Surface Science

Volumn 255, Issue 4, 2008, Pages 944-947

  Aoki, Takaaki ^a   Seki, Toshio ^a   Ninomiya, Satoshi ^a   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Cluster ion beam; MD simulation; Sputtering models

Indexed keywords

ATOMS; BOLTZMANN EQUATION; ION BOMBARDMENT; KINETIC ENERGY; KINETICS; MOLECULAR DYNAMICS; SPUTTERING;

ACCELERATION ENERGY; BOLTZMANN DISTRIBUTION; CLUSTER ION BEAMS; KINETIC ENERGY DISTRIBUTIONS; MD SIMULATION; MOLECULAR DYNAMICS SIMULATIONS; SPUTTERING MODELS; STATISTICAL PROPERTIES;

ION BEAMS;

EID: 56449112099     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.008     Document Type: Article

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