Enhanced optical properties of Al-doped TiO 2 thin films in oxygen or nitrogen atmosphere

Applied Surface Science

Volumn 255, Issue 20, 2009, Pages 8654-8659

  Lin, Su Shia ^a   Wu, Ding Kun ^a  

^a NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

Al doped TiO 2 film; Nitrogen; Oxygen; Porosity; Refractive index; Transmission

Indexed keywords

ALUMINUM COMPOUNDS; ARGON; MAGNETRON SPUTTERING; METALLIC FILMS; NITROGEN; OXYGEN; POROSITY; REFRACTIVE INDEX; THIN FILMS; TITANIUM DIOXIDE; TRANSMISSIONS;

DC MAGNETRON SPUTTERING; NANOCRYSTALLINITY; NITROGEN ATMOSPHERES; NITROGEN PRESSURE; NONLINEAR REFRACTIVE INDEX; OPTICAL COEFFICIENTS; RF-MAGNETRON SPUTTERING; TIO2 FILM;

NITROGEN COMPOUNDS;

EID: 67650456427     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.06.045     Document Type: Article

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