Reactive sputtered TiO2 thin film humidity sensor with negative substrate bias

Sensors and Actuators, B: Chemical

Volumn 76, Issue 1-3, 2001, Pages 310-315

  Chow, L L W ^a   Yuen, M M F ^a   Chan, P C H ^a   Cheung, A T ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

Anatase; Bias sputtering; Humidity sensors; Hysteresis; Rutile; Titanium oxide

Indexed keywords

ANNEALING; CERAMIC MATERIALS; HUMIDITY CONTROL; HYSTERESIS; OPTIMIZATION; SENSITIVITY ANALYSIS; SPUTTERING; SUBSTRATES; TITANIUM DIOXIDE;

BIAS SPUTTERING; HUMIDITY SENSORS;

SENSORS;

EID: 0035369491     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00602-5     Document Type: Conference Paper

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