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Volumn 202, Issue 22-23, 2008, Pages 5526-5529
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Effects of Al target power on the mechanical and oxidation resistance of the CrN/AlN multilayer coatings
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Author keywords
CrN AlN thin films; Magnetron sputtering; Oxidation resistance; Superlattice coating
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Indexed keywords
ALUMINUM;
ATOMIC SPECTROSCOPY;
CHEMICAL OXYGEN DEMAND;
CHROMIUM;
CHROMIUM COMPOUNDS;
CLADDING (COATING);
COATINGS;
CONCENTRATION (PROCESS);
CRYSTAL MICROSTRUCTURE;
CRYSTAL STRUCTURE;
DISLOCATIONS (CRYSTALS);
ELECTRIC DISCHARGES;
EMISSION SPECTROSCOPY;
FILM PREPARATION;
GLOW DISCHARGES;
HARDNESS;
HARDNESS TESTING;
IMAGING TECHNIQUES;
INORGANIC COATINGS;
MAGNETRON SPUTTERING;
MOLECULAR SPECTROSCOPY;
MULTILAYERS;
OPTICAL EMISSION SPECTROSCOPY;
OPTICAL MICROSCOPY;
OXIDATION;
OXIDATION RESISTANCE;
PHASE INTERFACES;
POWDERS;
SUPERLATTICES;
TESTING;
THICK FILMS;
THIN FILMS;
VAPOR DEPOSITION;
X RAY ANALYSIS;
X RAY DIFFRACTION ANALYSIS;
AL-CONTENT;
ALN LAYERS;
ALN THIN FILMS;
ATOMIC CONCENTRATIONS;
CHEMICAL COMPOSITIONS;
CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING;
CRN FILMS;
CRN/ALN THIN FILMS;
CRYSTAL PHASE;
CUBIC LATTICES;
DISLOCATION GLIDING;
ENHANCEMENT EFFECTS;
GLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY;
HARDNESS VALUES;
ISOTHERMAL OXIDATION TEST;
ISOTHERMAL OXIDATIONS;
MAXIMUM HARDNESS;
MULTI LAYERING;
MULTI-LAYER COATINGS;
NANO-INDENTATION HARDNESS;
SCANNING ELECTRON MICROSCOPY (SEM);
SINGLE LAYERS;
SUPER-LATTICE FILMS;
SUPERLATTICE COATING;
SUPERLATTICE COATINGS;
TARGET POWER;
X-RAY DIFFRACTION;
XRD ANALYSIS;
MULTILAYER FILMS;
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EID: 50649120123
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.06.146 Document Type: Article |
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Times cited : (28)
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References (15)
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