An analytical model for transient deformation of viscoelastically coated beams: Applications to static-mode microcantilever chemical sensors

Journal of Applied Physics

Volumn 105, Issue 12, 2009, Pages

  Heinrich, S M ^a   Wenzel, M J ^a   Josse, F ^a   Dufour, I ^b  

^a Opus College of Engineering   (United States)

^b UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; ANALYTICAL SOLUTIONS; APPROXIMATE FORMULAS; BASE LAYERS; BASE MATERIAL; BEAM THEORIES; COATING MODULUS; EIGEN-STRAIN; MICRO-CANTILEVER; PEAK RESPONSE; SIMPLE EXPRESSION; STEADY-STATE RESPONSE; SYSTEM BEHAVIORS; THIN COATING; TIME CONSTANTS; TIME HISTORY; TIME-DEPENDENT; TRANSIENT DEFORMATION; VISCOELASTIC COATINGS;

APPROXIMATION ALGORITHMS; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DEFORMATION;

COATINGS;

EID: 67650245710     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3148291     Document Type: Conference Paper

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