On the stoney formula for a thin film/substrate system with nonuniform substrate thickness

Journal of Applied Mechanics, Transactions ASME

Volumn 74, Issue 6, 2007, Pages 1276-1281

  Feng, X ^a   Huang, Y ^a   Rosakis, A J ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Interfacial shears; Nonlocal stress curvature relations; Nonuniform misfit strain; Nonuniform substrate thickness; Thin films

Indexed keywords

INTERFACIAL SHEARS; NONLOCAL STRESS-CURVATURE RELATIONS; NONUNIFORM MISFIT STRAIN; NONUNIFORM SUBSTRATE THICKNESS;

STRAIN; STRESS ANALYSIS; THERMAL EFFECTS; THICKNESS MEASUREMENT;

THIN FILMS;

EID: 38049150813     PISSN: 00218936     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2745392     Document Type: Article

References (18)

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