Combined in situ micromechanical cantilever-based sensing and ellipsometry

Review of Scientific Instruments

Volumn 74, Issue 11, 2003, Pages 4902-4907

  Godin, Michel ^a   Laroche, Olivier ^a   Tabard Cossa, Vincent ^a   Beaulieu, L Y ^a   Grütter, Peter ^a   Williams, P J ^b  

^a MCGILL UNIVERSITY   (Canada)

^b ACADIA UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; MOLECULAR STRUCTURE; MONOLAYERS; SCANNING TUNNELING MICROSCOPY; STRESS ANALYSIS; THERMAL NOISE; THIN FILMS; TURBULENT FLOW; X RAY DIFFRACTION ANALYSIS;

MICROMECHANICAL CANTILEVERS; SURFACE STRESS;

CHEMICAL SENSORS;

EID: 0344514869     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1614859     Document Type: Article

References (27)

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13. Positioners (9016) by New Focus.
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15. OPA111BM from Burr-Brown used as current-to-voltage converters. OPA627BP used for unity gain inverting amplification.
16. MPY634KP from Burr-Brown used for analog division.
17. 2), is directly proportional to the cantilever deflection, and is independent of the laser intensity impinging on the PSD.
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20. -1.
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