SiO adsorption on a p(2 × 2) reconstructed Si(1 0 0) surface

Surface Science

Volumn 603, Issue 6, 2009, Pages 901-906

  Violanda, Marites Labora ^a   Rudolph, Henrik ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Adsorption; Chemisorption; Density functional calculations; Silicon; Silicon monoxide

Indexed keywords

ADSORPTION ENERGIES; ADSORPTION MECHANISMS; DENSITY FUNCTIONAL; DENSITY FUNCTIONAL CALCULATIONS; DEPOSITION SURFACES; RECONSTRUCTED SURFACES; RED SHIFTS; SI SURFACES; SI(1 0 0 ); SI-O-SI BRIDGES; SILICON MONOXIDE; SIO MOLECULES; STABLE ADSORPTIONS; STICKING PROBABILITIES; VIBRATIONAL FREQUENCIES;

ACTIVATION ENERGY; ADSORPTION; CHEMICAL VAPOR DEPOSITION; CHEMISORPTION; DENSITY FUNCTIONAL THEORY; MOLECULES; NONMETALS; PLASMA DEPOSITION; SILICON COMPOUNDS; SILICON OXIDES;

SILICON;

EID: 67650146447     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2009.02.006     Document Type: Article

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