Creating microstructures on silicon wafers using UV-crosslinked polystyrene thin films

Polymer Engineering and Science

Volumn 49, Issue 5, 2009, Pages 945-948

  Knudsen, Daniel ^a   Harnish, Bernadette ^a   Toth, Ramona ^a   Yan, Mingdi ^a  

^a PORTLAND STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; HYDROFLUORIC ACID; MICROSTRUCTURE; POLYMER FILMS; POLYSTYRENES; THIN FILMS;

CHEMICAL ETCHING; CROSS-LINKED POLYSTYRENE; ETCH RESISTS; HF SOLUTIONS; POLYSTYRENE FILMS; POLYSTYRENE THIN FILMS; PROTECTIVE LAYERS; SIMPLE++; UV INDUCED; WET-CHEMICAL ETCH;

SILICON WAFERS;

EID: 67649548314     PISSN: 00323888     EISSN: 15482634     Source Type: Journal    
DOI: 10.1002/pen.21272     Document Type: Conference Paper

References (15)

1. American Chemical Society, Polymers for Microelectronics: Resists and Dielectrics, ACS, Washington, DC (1994).
2. C.K. Harnett, A.G. Lopez, K.M. Satyalakshmi, Y.F. Chen, and H.G. Craighead, Mater. Res. Soc. Symp. Proc, 636,D6 (2001).
3. K.R. Finnie, R. Haasch, and R.G. Nuzzo, Langmuir, 16, 6968 (2000).
4. J.C. Love, D.B. Wolfe, M.L. Chabinyc, K.E. Paul, and G.M. Whitesides, J. Am. Chem. Soc., 124, 1576 (2002).
5. M. Geissler, H. Schmid, A. Bietsch, B. Michel, and E. Delamarche, Langmuir, 18, 2374 (2002).
6. C.K. Luscombe, H.-W. Li, W.T.S. Huck, and A.B. Holmes, Langmuir, 19, 5273 (2003).
7. A. Kumar, H.A. Biebuyck, N.L. Abbott, and G.M. White- sides, J. Am. Chem. Soc., 114, 9188 (1992).
8. S. Sun and G.J. Leggett, Nano Lett., 2, 1223 (2002).
9. N.L. Leon, I.S. Choi, G.M. Whitesides, N.Y. Kim, P.E. Laibinis, Y. Harada, K.R. Finnie, G.S. Girolami, and R.G. Nuzzo, Appl. Phys. Lett., 75, 4201 (1999).
10. W.T.S. Huck, L. Yan, A. Stroock, R. Haag, and G.M. Whitesides, Langmuir, 15, 6862 (1999).
11. H. Gu, C. Xu, L.-T. Weng, and B. Xu, J. Am. Chem. Soc, 125, 9256 (2003).
12. M. Rolandi, I. Suez, H. Dai, and J.M.J. Frechet, Nano Lett., 4, 889 (2004).
13. R. Glass, M. Arnold, J. Bluemmel, A. Kueller, M. Moeller, and J.P. Spatz, Adv. Funct. Mater., 13, 569 (2003).
14. M. Yan and B. Harnish, Adv. Mater., 15, 244 (2003).
15. B. Harnish, J.T. Robinson, Z. Pei, O. Ramstrom, and M. Yan, Chem. Mater., 17, 4092 (2005).