Chapter 7 Novel Aberration Correction Concepts

Advances in Imaging and Electron Physics

Volumn 153, Issue , 2008, Pages 261-281

  Kabius, Bernd ^a   Rose, Harald ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTRON SOURCES; ELECTRONS; SIGNAL TO NOISE RATIO;

ABERRATION CORRECTION; CHROMATIC ABERRATION; ELECTRON-BEAM CURRENT; EMITTED ELECTRON; IN-SITU EXPERIMENTS; MONOCHROMATIZATION; SPATIAL RESOLUTION; TEMPORAL COHERENCE;

ABERRATIONS;

EID: 67649389807     PISSN: 10765670     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1076-5670(08)01007-0     Document Type: Chapter

References (34)

1. Basic Energy Sciences Advisory Committee (BESAC). (February 2000). Review of the electron beam microcharacterization centers.
2. Boersch H. Energy distribution of thermal electrons from electron beam sources. Die Naturwissenschaften 40 (1953) 267-268
3. Craig B.R., McVitie S., Chapman J.N., O'Donnell D.O., and Johnston A.B. Magnetic reversal behavior of multiscale permalloy elements. J. Appl. Phys. 102 (2007) 5 13911/1
4. Dellby N., Krivanek O.L., Nellist P.D., Batson P.E., and Lupini A.R. Progress in aberration-corrected scanning transmission electron microscopy. J. Electr. Micros. 50 (2001) 177-185
5. Haider, M. (2008). Personal communication.
6. Haider M., Bernhardt W., and Rose H. Design and test of an electric and magnetic dodecapole lens. Optik 63 (1982) 9-23
7. Haider M., Rose H., Uhlemann H., Schwan E., Kabius B., and Urban K. Electron microscopy image enhanced. Nature 392 (1998) 768-769
8. Haider M., Uhlemann S., and Zach J. Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM. Ultramicroscopy 81 (2000) 163-175
9. Houdellier F., Warot-Fonrose B., Hytch M.J., Snoeck E., Calmels L., Serin V., and Schattschneider P. New electron energy-loss magnetic chiral dichroism (EMCD) configuration using an aberration-corrected electron microscope. Microsc. Microanal. 13 Suppl 3 (2007) 48-49
10. Ishizuka K. Contrast transfer of crystal images in TEM. Ultramicroscopy 5 (1979) 55-65
11. Jia C.L., and Urban K. Atomic-resolution measurement of oxygen concentration in oxide materials. Science 303 (2004) 200-2004
12. Kabius B., Haider M., Uhlemann S., Schwan E., Urban K., and Rose H. First application of a spherical-aberration corrected transmission electron microscope in materials science. J. Electr. Microsc. 51 (2002) 51-58
13. Kirkland A., Chang L.Y., Haigh S., and Hetherington C. TEM without aberrations: applications to materials science. Curr. Appl. Phys. 8 (2008) 425-428
14. LaGrange T., Campbell G.H., Colvin J.D., Reed B., and King W.E. Nanosecond time-resolved electron diffraction studies of the α → β in pure Ti thin films using the dynamic transmission electron microscope (DTEM). J. Mater. Sci. 41 (2006) 4440-4444
15. Lentzen M., and Urban K. Contrast transfer and resolution limits for sub-Ångström high-resolution transmission electron microscopy. Microsc. Microanal. 12 Suppl 2 (2006) 1456-1457
16. Lentzen M., Jahnen B., Jia C.L., Thust A., Tillmann K., and Urban K. High-resolution imaging with an aberration-corrected transmission electron microscope. Ultramicroscopy 92 (2002) 233-242
17. Lichte H. Optimum focus for taking electron holograms. Ultramicroscopy 38 (1991) 13-22
18. Mantl S., Zhao Q.T., and Kabius B. Self-assembled patterning of ultrathin silicides by local oxidation. MRS Bull. 24 8 (1999) 31-35
19. Petford-Long A.K., Kohn A., Bromwich T., Jackson V., Castaño F., and Singh L.J. Application of TEM to the development of information-storage materials. Thin Solid Films 505 (2006) 10-15
20. Ringnalda J., Freitag B., Hubert D., and Stekelenburg M. Practical electron microscopy with correctors and monochromators. Microsc. Microanal. 13 Suppl2 (2007) 860-861
21. Rose H. Outline of a spherically corrected semiaplanatic medium-voltage transmission electron microscope. Optik 85 (1990) 19-24
22. Rose H. History of direct aberration correction. Adv. Imaging Electr. Phys. 53 (2008)
23. Rose R. Theory of electron-optical achromats and apochromats. Ultramicroscopy 93 (2002) 293-303
24. Ross F.M., Kammler M., Reuter M.C., and Hull R. In situ observations of self-assembled island nucleation on patterned substrates. Phil. Mag. 84 (2004) 2687-2697
25. Scherzer O. Über einige Fehler von Elektronenlinsen Über einige Fehler von Elektronenlinsen. Z. Phys. 101 (1936) 593-603
26. Scherzer O. Sphärische und chromatische Korrektur von Elektronen-Linsen. Optik 2 (1947) 114-132
27. Scherzer O. The theoretical resolution limit of the electron microscope. J. Appl. Phys. 20 (1949) 20-29
28. Song M., Mitsuishi K., Furuya K., Allen C.W., Birtcher R.C., and Donnelly S.E. Structure variation of nanometre-sized Xe particles embedded in Al crystals. Appl. Surface Sci. 241 (2005) 96-101
29. Stadelmann P.A. EMS: a software package for electron diffraction analysis and HREM simulation in materials science. Ultramicroscopy 21 (1987) 131-145
30. TEAM Workshop Report. Aberration correction in electron microscopy: materials research in an aberration-free environment (July 2000). Available at: http://ncem.lbl.gov/team/TEAM%20Report%202000.pdf
31. Thesen A.E., Matijevic M., and Benner G. Design features and ultimate performance of an ultra-high resolution, aberration-corrected, monochromatized 200 kV FEG-TEM. Microsc. Microanal. 11 Suppl 2 (2005) 2144-2145
32. Uhlemann, S. (1995). Aufbau und Leistungsgrenzen korrigierter analytischer Transmissions-Elektronenmikroskope. Ph.D. thesis, University of Darmstadt.
33. van Benthem K., Lupini A.R., Oxley M.P., Findlay S.D., Allen L.J., and Pennycook S.J. Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy. Ultramicroscopy 106 (2006) 1062-1068
34. Zemlin F., Weiss K., Schiske P., Kunath W., and Herrmann K.-H. Coma-free alignment of high-resolution electron microscopes with the aid of optical diffractograms. Ultramicroscopy 3 (1978) 49-60