Nano-mechanical cantilever arrays for low-power and low-voltage embedded nonvolatile memory applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6464, Issue , 2007, Pages

  Smith, Charles G ^a   Van Kampen, Rob ^c   Popp, Jens ^c   Lacy, Damian ^b   Pinchetti, Don ^b   Renault, Michael ^b   Joshi, Vikram ^b   Beunder, Mike A ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b Cavendish Kinetics Inc   (United States)

^c Cavendish Kinetics BV   (Netherlands)

Author keywords

Adhesion forces; Bi stable cantilever; Nano mechanical switch; Non volatile memory cell

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; ELECTRODES; MICROCONTROLLERS; VAN DER WAALS FORCES;

ADHESION FORCES; BI-STABLE CANTILEVERS; NANO-MECHANICAL SWITCHES; NON-VOLATILE MEMORY CELLS;

NANOSTRUCTURED MATERIALS;

EID: 34248596587     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.698964     Document Type: Conference Paper

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