Compact nano-electro-mechanical non-volatile memory (NEMory) for 3D integration

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 603-606

  Woo, Young Choi ^a   Kam, Hei ^a   Lee, Donovan ^a   Lai, Joanna ^a   Liu, Tsu Jae King ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CYTOLOGY; ELECTRON DEVICES; METALS; OPTICAL DESIGN;

3-D INTEGRATION; CELL DESIGN; ELECTRO-MECHANICAL; EMBEDDED MEMORIES; HIGH-DENSITY; METAL LAYERS; NANO-METER SCALE; NON-VOLATILE MEMORIES; NON-VOLATILE MEMORY; OPERATING VOLTAGES; POST-CMOS; VERTICAL DIMENSIONS;

CELLS;

EID: 50249178598     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4419011     Document Type: Conference Paper

References (6)

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