Surface acoustic wave devices on aln/single-crystal diamond for high frequency and high performances operation

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 1924-1927

  Benetti, M ^a   Cannata D ^a   Di Pietrantonio, F ^a   Verona, E ^a   Almaviva, S ^b   Prestopino, G ^b   Verona, C ^b   Verona Rinati, G ^b  

^a CNR   (Italy)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

AlN; Component; SAW propagation; Single crystal diamond

Indexed keywords

ALN; ALN THIN FILMS; CHEMICAL DEPOSITION; COMPONENT; DEGREE OF ORIENTATION; DELAY LINE; DIAMOND SUBSTRATES; HIGH FREQUENCY; HIGH PRESSURE; HIGH Q FACTOR; LOW INSERTION LOSS; MICROWAVE PLASMA; PHASE DISPERSION; ROCKING CURVES; SAW DEVICE; SINGLE-CRYSTAL DIAMOND; SPUTTERING TECHNIQUES; SURFACE ACOUSTIC WAVE DEVICE;

ACOUSTIC WAVES; ACOUSTICS; CURVE FITTING; DIAMOND FILMS; DIAMONDS; MICROWAVES; PLASMA DEPOSITION; RESONATORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 67649353256     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0474     Document Type: Conference Paper

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