Thermochemical patterning of polymer thin films with tunable size-reduction effects using metal-coated poly(dimethylsiloxane) stamps

Advanced Materials

Volumn 21, Issue 21, 2009, Pages 2211-2215

  Wang, Fangfang ^a   Xue, Mianqi ^a   Cao, Tingbing ^a  

^a RENMIN UNIVERSITY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINK; CROSSLINKER; KEITHLEY; LOCALIZED HEATING; METAL-COATED; POLY(VINYL PHENOL); POLYDIMETHYLSILOXANE PDMS; POLYMER THIN FILMS; POWER SUPPLY; SILICON SUBSTRATES; SIZE-REDUCTION; THIN LAYERS;

ELECTRODES; FILM THICKNESS; GOLD; MELAMINE FORMALDEHYDE RESINS; METALS; MICROCHANNELS; PHENOLIC RESINS; PHENOLS; PHOTORESISTS; PLASTIC COATINGS; PLASTIC FILMS; POLYMER FILMS; POLYMERS; SILICON WAFERS; SILICONES; SUBSTRATES; THIN FILM DEVICES; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 67649300283     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200802707     Document Type: Article

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