Exploration of thermolithography for micro- and nanomanufacturing

Applied Physics Letters

Volumn 88, Issue 12, 2006, Pages

  Hung, Ming Tsung ^a   Kim, Jichul ^a   Ju, Y Sungtaek ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Biomedical Engineering Interdepartmental Program   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOMANUFACTURING; NANOSCALE DEVICES; PHOTORESIST LAYERS; THERMAL TRANSPORT PROPERTIES; THERMOLITHOGRAPHY;

CROSSLINKING; PHOTORESISTORS; REACTION KINETICS; SEMICONDUCTOR DEVICES; THIN FILMS; TRANSPORT PROPERTIES;

LITHOGRAPHY;

EID: 33645533649     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2187948     Document Type: Article

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