A microwave probe nanostructure for atomic force microscopy

Microsystem Technologies

Volumn 15, Issue 8, 2009, Pages 1195-1199

  Ju, Y ^a   Hamada, M ^a   Kobayashi, T ^b   Soyama, H ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM PROBE; ATOMIC FORCE MICROSCOPES; AU FILM; BOTTOM SURFACES; GAAS; GAAS WAFER; MICROWAVE EMISSIONS; MICROWAVE PROBES; NANOMETER-SCALE RESOLUTION; OPEN STRUCTURE; RADIUS OF CURVATURE;

ATOMIC FORCE MICROSCOPY; ATOMS; CHROMIUM; FABRICATION; FOCUSED ION BEAMS; GALLIUM ALLOYS; GOLD; MICROWAVES; SEMICONDUCTING GALLIUM; WAVEGUIDES;

PROBES;

EID: 67649191645     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-009-0782-9     Document Type: Conference Paper

References (9)

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