Fabrication of a GaAs microwave probe used for atomic force microscope

2007 Proceedings of the ASME InterPack Conference, IPACK 2007

Volumn 1, Issue , 2007, Pages 963-966

  Ju, Yang ^a   Kobayashi, Tetsuya ^b   Soyama, Hitoshi ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM SURFACES; MICROWAVE PROBES;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; MICROFABRICATION; MICROWAVE DEVICES; SEMICONDUCTING GALLIUM ARSENIDE; WAVEGUIDES;

PROBES;

EID: 40449106574     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IPACK2007-33613     Document Type: Conference Paper

References (8)