Development of a nanostructural microwave probe based on GaAs

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 1021-1025

  Ju, Y ^a   Kobayashi, T ^b   Soyama, H ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MEASUREMENT THEORY; MICROWAVES; SEMICONDUCTING GALLIUM ARSENIDE;

MATERIAL TOPOGRAPHY; PROFILE ANALYSIS;

THIN FILMS;

EID: 44249113344     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0484-0     Document Type: Conference Paper

References (9)

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