SLM-based maskless lithography for TFT-LCD

Applied Surface Science

Volumn 255, Issue 18, 2009, Pages 7835-7840

  Kim, Kwang Ryul ^a   Yi, Junsin ^a   Cho, Sung Hak ^b   Kang, Nam Hyun ^c   Cho, Myung Woo ^d   Shin, Bo Sung ^c   Choi, Byoungdeog ^a  

^a Sungkyunkwan University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

^c Pusan National University   (South Korea)

^d Inha University   (South Korea)

Author keywords

DMD; GLV; Maskless lithography; Spatial light modulator

Indexed keywords

DIGITAL DEVICES; ENGINES; LIGHT; LIGHT MODULATION; LIQUID CRYSTAL DISPLAYS; LITHOGRAPHY; MICROLENSES; PHOTOMASKS; SEMICONDUCTOR LASERS; THIN FILM TRANSISTORS;

DIGITAL MICRO-MIRROR DEVICE; GRATING LIGHT VALVE; ILLUMINATION SOURCES; LIQUID-CRYSTAL DISPLAY PANELS; LITHOGRAPHIC PROCESS; MASK-LESS LITHOGRAPHY; MICRO-LENS ARRAYS; SPATIAL LIGHT MODULATORS;

LIGHT MODULATORS;

EID: 67549091224     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.05.022     Document Type: Review

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