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Applied Surface Science

Volumn 255, Issue 15, 2009, Pages 6802-6805

Epitaxial SiC formation induced by medium energy ions on Si(1 1 1) at room temperature

(5) Kumar, Praveen a,d,e Nair, Lekha b Bera, Santanu c Mehta, B R d Shivaprasad, S M e

a NATIONAL PHYSICAL LABORATORY (India)

b JAMIA MILLIA ISLAMIA CENTRAL UNIVERSITY (India)

c INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH (India)

d INDIAN INSTITUTE OF TECHNOLOGY DELHI (India)

e JAWAHARLAL NEHRU CENTRE FOR ADVANCED SCIENTIFIC RESEARCH (India)

Author keywords

Ion beam induced reactions; Reaction threshold; Silicon carbide; X ray photoelectron spectroscopy

Indexed keywords

FORWARD SCATTERING; ION BEAMS; IONS; PHOTOELECTRONS; PHOTONS; SILICON CARBIDE;

ANGLE-DEPENDENT; INSULATOR PHASE; ION SPUTTERING; LAYER FORMATION; PROOF OF CONCEPT; REACTION THRESHOLDS; SIC FORMATION; SILICON TECHNOLOGIES;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 67349198872 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2009.02.075 Document Type: Article

Times cited : (12)

References (20)

1
- 0029779805
- Nakamura S., Senoh M., Nagahama S., Isawa N., Yamada T., Matsushita T., Kiyoku H., and Sugimoto Y. Jpn. J. Appl. Phys. Part 2 35 (1996) L74
- (1996) Jpn. J. Appl. Phys. Part 2 , vol.35
- Nakamura, S.¹ Senoh, M.² Nagahama, S.³ Isawa, N.⁴ Yamada, T.⁵ Matsushita, T.⁶ Kiyoku, H.⁷ Sugimoto, Y.⁸

2
- 0842277372
- Khan M.A., Bhattarai A., Kuznia J.N., and Olson D.T. Appl. Phys. Lett. 63 (1993) 1214
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1214
- Khan, M.A.¹ Bhattarai, A.² Kuznia, J.N.³ Olson, D.T.⁴

3
- 41349100249
- Cherns D., Meshi L., Griffiths I., Khongphetsak S., Novikov S.V., Farley N., Campion R.P., and Foxon C.T. Appl. Phys. Lett. 92 (2008) 121902
- (2008) Appl. Phys. Lett. , vol.92 , pp. 121902
- Cherns, D.¹ Meshi, L.² Griffiths, I.³ Khongphetsak, S.⁴ Novikov, S.V.⁵ Farley, N.⁶ Campion, R.P.⁷ Foxon, C.T.⁸

4
- 55149124939
- Oh T.S., Kim S.H., Kim T.K., Lee Y.S., Jeong H., Yang G.M., and Suh E.K. Jpn. J. Appl. Phys. 47 (2008) 5333
- (2008) Jpn. J. Appl. Phys. , vol.47 , pp. 5333
- Oh, T.S.¹ Kim, S.H.² Kim, T.K.³ Lee, Y.S.⁴ Jeong, H.⁵ Yang, G.M.⁶ Suh, E.K.⁷

5
- 67349205706
- in press
- P. Kumar, S. Bhattacharya, Govind, B.R. Mehta, S.M. Shivaprasad, J. Nanosci. Nanotechnol., in press.
- J. Nanosci. Nanotechnol
- Kumar, P.¹ Bhattacharya, S.² Govind³ Mehta, B.R.⁴ Shivaprasad, S.M.⁵

6
- 34548446734
- Kumar M., Govind V.K., Paliwal A.G., Vedashwar S., and Shivaprasad M. J. Nanosci. Nanotechnol. 7 (2007) 1841
- (2007) J. Nanosci. Nanotechnol. , vol.7 , pp. 1841
- Kumar, M.¹ Govind, V.K.² Paliwal, A.G.³ Vedashwar, S.⁴ Shivaprasad, M.⁵

7
- 0037116010
- Paliwal V.K., Vedeshwar A.G., and Shivaprasad S.M. Phys. Rev. B 66 (2002) 245404
- (2002) Phys. Rev. B , vol.66 , pp. 245404
- Paliwal, V.K.¹ Vedeshwar, A.G.² Shivaprasad, S.M.³

8
- 0035128341
- Hishita S., Aizawa T., Suehera S., and Haneda H. Appl. Surf. Sci. 169-170 (2001) 296
- (2001) Appl. Surf. Sci. , vol.169-170 , pp. 296
- Hishita, S.¹ Aizawa, T.² Suehera, S.³ Haneda, H.⁴

9
- 3142550784
- Funsten H.O., Ritzau S.M., Harper R.W., Borovsky J.E., and Johnson R.E. Phys. Rev. Lett. 92 (2004) 213201
- (2004) Phys. Rev. Lett. , vol.92 , pp. 213201
- Funsten, H.O.¹ Ritzau, S.M.² Harper, R.W.³ Borovsky, J.E.⁴ Johnson, R.E.⁵

10
- 0038303651
- Enta Y., Suzuki S., Kono S., and Sakamoto T. Phys. Rev. B 39 (1989) 5524
- (1989) Phys. Rev. B , vol.39 , pp. 5524
- Enta, Y.¹ Suzuki, S.² Kono, S.³ Sakamoto, T.⁴

11
- 0001183084
- Johansson L.I., Owman F., Martensson P., Persson C., and Lindefelt U. Phys. Rev. B 53 (1996) 13803
- (1996) Phys. Rev. B , vol.53 , pp. 13803
- Johansson, L.I.¹ Owman, F.² Martensson, P.³ Persson, C.⁴ Lindefelt, U.⁵

12
- 0035128341
- Hishita S., Aizawa T., Suehara S., and Haneda H. Appl. Surf. Sci. 169 (2001) 296
- (2001) Appl. Surf. Sci. , vol.169 , pp. 296
- Hishita, S.¹ Aizawa, T.² Suehara, S.³ Haneda, H.⁴

13
- 0001364471
- Dufour G., Rochet F., Stedile F.C., Poncey C., De Crescenzi M., Gunnella R., and Froment M. Phys. Rev. B 56 (1997) 4266
- (1997) Phys. Rev. B , vol.56 , pp. 4266
- Dufour, G.¹ Rochet, F.² Stedile, F.C.³ Poncey, C.⁴ De Crescenzi, M.⁵ Gunnella, R.⁶ Froment, M.⁷

14
- 33845617572
- Katharria Y.S., Singh F., Kumar P., and Kanjilal D. Nucl. Instrum. Methods Phys. Res. B 254 (2007) 78
- (2007) Nucl. Instrum. Methods Phys. Res. B , vol.254 , pp. 78
- Katharria, Y.S.¹ Singh, F.² Kumar, P.³ Kanjilal, D.⁴

15
- 0000976568
- Reinke P., Rudmann D., and Oelhafen P. Phys. Rev. B 61 (2000) 16967
- (2000) Phys. Rev. B , vol.61 , pp. 16967
- Reinke, P.¹ Rudmann, D.² Oelhafen, P.³

16
- 33947709896
- Prakash R., Amirthapandian S., Phase D.M., Deshpande S.K., Kesavamoorthy R., and Nair K.G.M. Nucl. Instrum. Methods Phys. Res. B 244 (2006) 283
- (2006) Nucl. Instrum. Methods Phys. Res. B , vol.244 , pp. 283
- Prakash, R.¹ Amirthapandian, S.² Phase, D.M.³ Deshpande, S.K.⁴ Kesavamoorthy, R.⁵ Nair, K.G.M.⁶

17
- 34250744234
- Pecz B., Makkai Zs., Barsony I., Deak P., and Josepovits K.V. Surf. Sci. 601 (2007) 2671
- (2007) Surf. Sci. , vol.601 , pp. 2671
- Pecz, B.¹ Makkai, Zs.² Barsony, I.³ Deak, P.⁴ Josepovits, K.V.⁵

18
- 4244078042
- Zhang Z.J., Naramoto H., Miyashita A., Stritzker B., and Lindner J.K.N. Phys. Rev. B 58 (1998) 12652
- (1998) Phys. Rev. B , vol.58 , pp. 12652
- Zhang, Z.J.¹ Naramoto, H.² Miyashita, A.³ Stritzker, B.⁴ Lindner, J.K.N.⁵

19
- 67349121883
- Bischoff J.L., Dentel D., and Kubler L. Surf. Sci. 415 (1998) 397
- (1998) Surf. Sci. , vol.415 , pp. 397
- Bischoff, J.L.¹ Dentel, D.² Kubler, L.³

20
- 0033204336
- Bittencourt C. J. Phys. D: Appl. Phys. 32 (1999) 2478
- (1999) J. Phys. D: Appl. Phys. , vol.32 , pp. 2478
- Bittencourt, C.¹

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