Synthesis and characterization of embedded SiC phase

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 254, Issue 1, 2007, Pages 78-82

  Katharria, Y S ^a   Singh, F ^a   Kumar, P ^a   Kanjilal, D ^a  

^a INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

Amorphization; Fourier transform infrared spectroscopy; Ion implantation; SiC; X ray diffraction

Indexed keywords

AMORPHIZATION; ANNEALING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION IMPLANTATION; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION;

IMPLANTATION INDUCED DEFECTS; ION BEAM BOMBARDMENT; POLYCRYSTALLINE PHASE;

SILICON CARBIDE;

EID: 33845617572     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.09.016     Document Type: Article

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