Microstructural characteristics and mechanical properties of magnetron sputtered nanocrystalline tin films on glass substrate

Bulletin of Materials Science

Volumn 32, Issue 2, 2009, Pages 117-123

  Chawla, Vipin ^a,b   Jayaganthan, R ^a   Chandra, Ramesh ^b  

^a Centre of Nanotechnology   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY ROORKEE   (India)

Author keywords

Microstructural characterization; Nanoindentation; TiN thin films

Indexed keywords

AFM; AFM IMAGE; D.C. MAGNETRON SPUTTERING; DEPOSITED FILMS; GLASS SUBSTRATES; HARDNESS VALUES; MICRO-STRAIN; MICROSTRUCTURAL CHARACTERISTICS; MICROSTRUCTURAL CHARACTERIZATION; MODULUS OF ELASTICITY; NANOCRYSTALLINE; NANOCRYSTALLINE FILMS; NANOINDENTATION TECHNIQUES; PREFERRED ORIENTATIONS; SEM; SURFACE ENERGIES; TIN FILMS; TIN THIN FILMS; XRD; XRD ANALYSIS;

ATOMIC FORCE MICROSCOPY; FILM THICKNESS; GLASS; HARDNESS; MAGNETRONS; MECHANICAL PROPERTIES; METALLIC FILMS; MOLECULAR BEAM EPITAXY; NANOCRYSTALLINE ALLOYS; NANOINDENTATION; SURFACE CHEMISTRY; SURFACE ROUGHNESS; SURFACE TENSION; THIN FILMS; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

FILM GROWTH;

EID: 67049158184     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12034-009-0018-8     Document Type: Article

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