Effect of substrate temperature on structural and materials properties of zirconium nitride films on D9 steel substrates

Crystal Research and Technology

Volumn 44, Issue 5, 2009, Pages 511-516

  Ashok, K ^a   Subramanian, B ^a   Kuppusami, P ^b   Jayachandran, M ^a  

^a CENTRAL ELECTROCHEMICAL RESEARCH INSTITUTE   (India)

^b INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

Author keywords

AFM; Magnetron sputtering; Thin films; XRD

Indexed keywords

AFM; CHEMICAL STATE; DIRECT CURRENT MAGNETRON SPUTTERING; HARDNESS AND ELASTIC MODULUS; NANOINDENDATION; STEEL SUBSTRATE; SUBSTRATE TEMPERATURE; X-RAY PHOTOELECTRON MICROSCOPY; XPS; XRD; XRD TECHNIQUE; ZIRCONIUM NITRIDE;

ATOMIC FORCE MICROSCOPY; CRYSTALLITE SIZE; MAGNETRONS; MATERIALS PROPERTIES; NITRIDES; PHOTOELECTRON SPECTROSCOPY; STEEL; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM;

SUBSTRATES;

EID: 67049125736     PISSN: 02321300     EISSN: 15214079     Source Type: Journal    
DOI: 10.1002/crat.200800630     Document Type: Article

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