Large-scale polycrystalline SiC micromachining technologies

ECS Transactions

Volumn 16, Issue 14, 2009, Pages 63-71

  Roper, C S ^a,c   Howe, R T ^b   Maboudian, R ^a  

^a University of California   (United States)

^b Stanford University   (United States)

^c Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROFLUORIC ACID; MICROFABRICATION; MICROMACHINING; NITRIC ACID; POLYCRYSTALLINE MATERIALS; POLYSILICON; SILICON CARBIDE; SILICON WAFERS; THIN FILMS; WET ETCHING;

150 MM DIAMETER WAFERS; HARSH ENVIRONMENT; MICROFABRICATION METHODS; MICROMACHINING TECHNOLOGIES; ORDERS OF MAGNITUDE; POLYCRYSTALLINE SIC; SCALE DEPOSITION; THIN-FILM DEPOSITIONS;

DEPOSITION;

EID: 66649106737     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2992229     Document Type: Conference Paper

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