Thick epitaxial layers growth by chlorine addition

Materials Science Forum

Volumn 615 617, Issue , 2009, Pages 55-60

  La Via, F ^a   Izzo, G ^b   Camarda, M ^a   Abbondanza, G ^c   Crippa, D ^d  

^a CNR IMM   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

^c C o BIC Sicilia Pantano d'Arci   (Italy)

^d LPE   (Italy)

Author keywords

Chlorine; High growth rate; Thick epitaxial layers

Indexed keywords

CHLORINE; GROWTH RATE; POWER SEMICONDUCTOR DIODES; SCHOTTKY BARRIER DIODES; SILICON CARBIDE; X RAY DETECTORS;

CHLORINE ADDITIONS; HIGH GROWTH RATE; HIGH-POWER DEVICES; LOW COSTS; LOW DEFECT DENSITIES; SCHOTTKY DIODES; STRUCTURAL CHARACTERIZATION; THICK EPITAXIAL LAYERS;

EPITAXIAL GROWTH;

EID: 66249094989     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.615-617.55     Document Type: Conference Paper

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