Impact of finite laser bandwidth on the critical dimension of L/S structures

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 3, 2008, Pages

  De Bisschop, Peter ^a   Lalovic, Ivan ^b   Trintchouk, Fedor ^b  

^a IMEC   (Belgium)

^b CYMER INC   (United States)

Author keywords

E95; E99; Laser bandwidth; Optical lithography; Optical proximity; Second moment

Indexed keywords

PHOTOLITHOGRAPHY; SCANNING;

E95; E99; LASER BANDWIDTH; OPTICAL PROXIMITY; SECOND MOMENTS;

BANDWIDTH;

EID: 65849409922     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2964297     Document Type: Article

References (13)

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2. A. Kroyan, I. Lalovic, and N. Farrar, "Effects of 95% intergral vs. FWHM bandwidth specifications on lithographic imaging," Proc. SPIE 4346, 1244-1253 (2001).
3. A. Kroyan, I. Lalovic, and N. Farrar, "Contribution of polychromatic illumination to optical proximity effects in the context of deep-UV lithography," Proc. SPIE 4562, 1112 (2002).
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8. I. Lalovic, O. Kritsun, J. Bendik, M. Smith, C. Sallee, and N. Farrar, "Fast and accurate laser bandwidth modeling of optical proximity effects," Proc. SPIE 6730, 67301X-1-14 (2007).
9. We try to avoid the more traditional but confusing term "aerialimages" intensity. What we mean with "resist-image" intensity is the image intensity in the resist, just below the resist surface.
10. Commercial simulators, such as PROLITH™ (as of version 9.3.1), now allow the user to directly input the Fλ value and a corresponding laser spectrum file, generated from laser spectrometry data, which is accessible to the laser manufacturer.
11. I. Lalovic, N. Farrar, K. Takahashi, E. Kent, D. Colon, G. Rylov, A. Acheta, K. Toyoda, and H. Levinson, "RELAX: Resolution Enhancement by laser-spectrum adjusted exposure," Proc. SPIE 5754, 447-455 (2005). (Pubitemid 41336173)
12. We used Eq. (856.08) from Tables of Integrals and Other Mathematical Data, H. B. Dwight, 4th edition, 1972, Macmillan.
13. See, e.g., 〈http://en.wikipedia.org/wiki/Linear-regression〉