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Volumn 267, Issue 1-4, 2009, Pages 322-329

Nanofretting behaviors of monocrystalline silicon (1 0 0) against diamond tips in atmosphere and vacuum

Author keywords

Atomic force microscopy; Hillock; Monocrystalline silicon; Nanofretting; Nanotribology

Indexed keywords

CONTACT PRESSURES; DAMAGE MODES; DIAMOND TIP; HIGH LOAD; HILLOCK; IN-VACUUM; LOW LOAD; MONOCRYSTALLINE SILICON; NANOFRETTING; NORMAL LOADS; OXIDE LAYER; SI(1 0 0); SOFT COATING; SPHERICAL DIAMOND; TANGENTIAL FORCE; VACUUM CONDITION;

EID: 65749102863     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2008.11.008     Document Type: Article
Times cited : (45)

References (26)
  • 1
    • 34748887261 scopus 로고    scopus 로고
    • Nanofretting behaviors of NiTi shape memory alloy
    • Qian L.M., Zhou Z.R., Sun Q.P., and Yan W.Y. Nanofretting behaviors of NiTi shape memory alloy. Wear 263 (2007) 501-507
    • (2007) Wear , vol.263 , pp. 501-507
    • Qian, L.M.1    Zhou, Z.R.2    Sun, Q.P.3    Yan, W.Y.4
  • 3
    • 34247644886 scopus 로고    scopus 로고
    • An industrial and applied review of new MEMS devices features
    • Tanaka M. An industrial and applied review of new MEMS devices features. Microelectron. Eng. 84 (2007) 1341-1344
    • (2007) Microelectron. Eng. , vol.84 , pp. 1341-1344
    • Tanaka, M.1
  • 4
    • 34247159421 scopus 로고    scopus 로고
    • Trends and frontiers of MEMS
    • Ko W.H. Trends and frontiers of MEMS. Sens. Actuators A 136 (2007) 62-67
    • (2007) Sens. Actuators A , vol.136 , pp. 62-67
    • Ko, W.H.1
  • 5
    • 35548953612 scopus 로고    scopus 로고
    • Microstructured vacuum gauges and their future perspectives
    • Volklein F., and Meier A. Microstructured vacuum gauges and their future perspectives. Vacuum 82 (2008) 420-430
    • (2008) Vacuum , vol.82 , pp. 420-430
    • Volklein, F.1    Meier, A.2
  • 6
    • 34347272265 scopus 로고    scopus 로고
    • Complex MEMS: a fully integrated TOF micro mass spectrometer
    • Wapelhorst E., Hauschild J.-P., and Müller J. Complex MEMS: a fully integrated TOF micro mass spectrometer. Sens. Actuators A 138 (2007) 22-27
    • (2007) Sens. Actuators A , vol.138 , pp. 22-27
    • Wapelhorst, E.1    Hauschild, J.-P.2    Müller, J.3
  • 7
    • 34247882720 scopus 로고    scopus 로고
    • Mass spectra measured by a fully integrated MEMS mass spectrometer
    • Hauschild J.-P., Wapelhorst E., and Müller J. Mass spectra measured by a fully integrated MEMS mass spectrometer. Int. J. Mass Spectrom. 264 (2007) 53-60
    • (2007) Int. J. Mass Spectrom. , vol.264 , pp. 53-60
    • Hauschild, J.-P.1    Wapelhorst, E.2    Müller, J.3
  • 8
    • 38349136201 scopus 로고    scopus 로고
    • Multipurpose MEMS thermal sensor based on thermopiles
    • Randjelovi D., Petropoulos A., Kaltsas G., et al. Multipurpose MEMS thermal sensor based on thermopiles. Sens. Actuators A 141 (2008) 404-413
    • (2008) Sens. Actuators A , vol.141 , pp. 404-413
    • Randjelovi, D.1    Petropoulos, A.2    Kaltsas, G.3
  • 12
    • 23844475798 scopus 로고    scopus 로고
    • Nanoscale fretting wear study by scanning probe microscopy
    • Varenberg M., Etsion I., and Halperin G. Nanoscale fretting wear study by scanning probe microscopy. Trib. Lett. 18 (2005) 493-498
    • (2005) Trib. Lett. , vol.18 , pp. 493-498
    • Varenberg, M.1    Etsion, I.2    Halperin, G.3
  • 13
    • 67349093254 scopus 로고    scopus 로고
    • 2 microsphere in vacuum, Trib. Lett. Published on line. DOI 10.1007/s11249-008-9385-3, 2008.
    • 2 microsphere in vacuum, Trib. Lett. Published on line. DOI 10.1007/s11249-008-9385-3, 2008.
  • 14
    • 0042266906 scopus 로고    scopus 로고
    • An improved wedge calibration method for lateral force in atomic force microscopy
    • Varenberg M., Etsion I., and Halperin G. An improved wedge calibration method for lateral force in atomic force microscopy. Rev. Sci. Instrum. 74 (2003) 3362-3367
    • (2003) Rev. Sci. Instrum. , vol.74 , pp. 3362-3367
    • Varenberg, M.1    Etsion, I.2    Halperin, G.3
  • 15
    • 35949002047 scopus 로고    scopus 로고
    • An improved calibration method for friction force in atomic force microscopy
    • Yu J.X., and Qian L.M. An improved calibration method for friction force in atomic force microscopy. Tribology 27 5 (2007) 472-476
    • (2007) Tribology , vol.27 , Issue.5 , pp. 472-476
    • Yu, J.X.1    Qian, L.M.2
  • 16
    • 23844514795 scopus 로고    scopus 로고
    • Fretting wear behavior of superelastic nickel titanium shape memory alloy
    • Qian L.M., Sun Q.P., and Zhou Z.R. Fretting wear behavior of superelastic nickel titanium shape memory alloy. Tribol. Lett. 18 4 (2005) 463-475
    • (2005) Tribol. Lett. , vol.18 , Issue.4 , pp. 463-475
    • Qian, L.M.1    Sun, Q.P.2    Zhou, Z.R.3
  • 17
    • 0037532334 scopus 로고    scopus 로고
    • Analysis of microwear experiments on thin DLC coatings: friction, wear and plastic deformation
    • Schiffmann K.I., and Hieke A. Analysis of microwear experiments on thin DLC coatings: friction, wear and plastic deformation. Wear 254 (2003) 565-572
    • (2003) Wear , vol.254 , pp. 565-572
    • Schiffmann, K.I.1    Hieke, A.2
  • 18
    • 0029310997 scopus 로고
    • Analysis of sliding behavior for fretting loadings: determination of transition criteria
    • Fouvry S., Kapsa Ph., and Vincent L. Analysis of sliding behavior for fretting loadings: determination of transition criteria. Wear 185 (1995) 35-46
    • (1995) Wear , vol.185 , pp. 35-46
    • Fouvry, S.1    Kapsa, Ph.2    Vincent, L.3
  • 19
    • 33746914325 scopus 로고    scopus 로고
    • Fretting behaviour of W-Si coated steels in vacuum environments
    • Ramalho A., Merstallinger A., and Cavaleiro A. Fretting behaviour of W-Si coated steels in vacuum environments. Wear 261 (2006) 79-85
    • (2006) Wear , vol.261 , pp. 79-85
    • Ramalho, A.1    Merstallinger, A.2    Cavaleiro, A.3
  • 20
    • 85040875608 scopus 로고
    • Cambridge University Press, Cambridge UK
    • Johnson K.L. Contact Mechanics (1985), Cambridge University Press, Cambridge UK
    • (1985) Contact Mechanics
    • Johnson, K.L.1
  • 21
    • 0035482578 scopus 로고    scopus 로고
    • Nano- to microscale wear and mechanical characterization using scanning probe microscopy
    • Bhushan B. Nano- to microscale wear and mechanical characterization using scanning probe microscopy. Wear 251 (2001) 1105-1123
    • (2001) Wear , vol.251 , pp. 1105-1123
    • Bhushan, B.1
  • 22
    • 0030293526 scopus 로고    scopus 로고
    • Nanoindentation and picoindentation measurements using a capacitive transducer system in atomic force microscopy
    • Bhushan B., Kulkarni A.V., Bonin W., and Wyrobek J.T. Nanoindentation and picoindentation measurements using a capacitive transducer system in atomic force microscopy. Philos. Mag. 74 (1996) 1117-1128
    • (1996) Philos. Mag. , vol.74 , pp. 1117-1128
    • Bhushan, B.1    Kulkarni, A.V.2    Bonin, W.3    Wyrobek, J.T.4
  • 23
    • 0242583831 scopus 로고    scopus 로고
    • Tribological properties of self-assembled monolayers and their substrates under various humid environments
    • Qian L.M., Tang F., and Xiao X.D. Tribological properties of self-assembled monolayers and their substrates under various humid environments. Trib. Lett. 15 (2003) 169-176
    • (2003) Trib. Lett. , vol.15 , pp. 169-176
    • Qian, L.M.1    Tang, F.2    Xiao, X.D.3
  • 24
    • 65849325415 scopus 로고    scopus 로고
    • B.J. Yu, L.M. Qian, J. X. Yu, Z.R. Zhou, Effects of tail group and chain length on the tribological behaviors of self-assembled dual-layer films in atmosphere and in vacuum, Trib. Lett. Published on line. DOI 10.1007/s11249-008-9363-9, 2008.
    • B.J. Yu, L.M. Qian, J. X. Yu, Z.R. Zhou, Effects of tail group and chain length on the tribological behaviors of self-assembled dual-layer films in atmosphere and in vacuum, Trib. Lett. Published on line. DOI 10.1007/s11249-008-9363-9, 2008.
  • 25
    • 65749107772 scopus 로고    scopus 로고
    • B.J. Yu, L.M. Qian, Z.R. Zhou, J.X. Yu, Negative nanowear-the formation of hillocks on monocrystalline silicon in atmosphere and in vacuum. Tribol. Int. (2008), under review.
    • B.J. Yu, L.M. Qian, Z.R. Zhou, J.X. Yu, Negative nanowear-the formation of hillocks on monocrystalline silicon in atmosphere and in vacuum. Tribol. Int. (2008), under review.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.