Trends and frontiers of MEMS

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 62-67

  Ko, Wen H ^a,b  

^a Case Western Reserve University   (United States)

^b XIAMEN UNIVERSITY   (China)

Author keywords

MEMS; Trends and frontiers

Indexed keywords

BIOMEDICAL EQUIPMENT; FUEL CELLS; MARKETING; OPTICAL COMMUNICATION; PRODUCT DEVELOPMENT; SILICON; TECHNOLOGY TRANSFER;

ENERGY CONVERTERS; ENVIRONMENTAL MONITORING; FUNCTIONAL SYSTEMS; MICROMIXED TECHNOLOGY;

MEMS;

EID: 34247159421     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.02.001     Document Type: Review

References (11)

1. Smith C.S. Piezoresistance effect in germanium and silicon. Phys. Rev. 94 1 (1954) 42-49
2. R.P. Feynman, "There's Plenty of Room at the Bottom: An Invitation to Enter a New World of Physics," a classic talk gave on December 29th 1959 at the annual meeting of the American Physical Society at the California Institute of Technology (Caltech), published in the February 1960 issue of Caltech's Engineering and Science.
3. Nathanson H.C., Newell W.E., Wickstrom R.A., and Davis J.R. The resonant gate transistor. IEEE Trans. Electron Dev. 14 (1967) 117-133
4. Roylance L., and Angell J. A miniature integrated circuit accelerometer. Digest of 1978 IEEE International Solid-State Circuits Conference (1978) 220-221
5. Petersen K.E. Silicon as a mechanical material. Proc. IEEE 70 5 (1982) 420-457
6. Petersen K. A New Age for MEMS. Digest of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), vol. 1. June (2005) 1-4
7. Michael W. Judy, "Evolution of integrated inertial MEMS technology," Solid-State Sensor, Actuator and Microsystems Workshop Digest 0-9640024-5-0, Hilton Head Island, South Carolina, USA, June 6-10, 2004, pp. 27-32.
8. Suster M., Guo J., Chaimanonart N., Ko W.H., and Young D.J. A high-performance MEMS capacitive strain sensor microsystem IEEE. J. Microelectromech. Syst. 15 5 (2006) 1069-1077
9. Hagleitner C., Hierlemann A., Lange D., Kummer A., Kerness N., Brand O., and Baltes H. Smart single-chip gas sensor microsystem. Nature 414 (2001) 293-296
10. Malik T., and Sanjay M. Sensor networks: an overview. IEEE Potentials 22 2 (2003) 20-23
11. Liang G., and Cui T. Fabrication and characterization of poly (3,4-ethylenedioxy-thiophene) field effect transistors. Solid State Electron. 48 1 (2004) 87-89