Microstructured vacuum gauges and their future perspectives

Vacuum

Volumn 82, Issue 4, 2007, Pages 420-430

  Volklein F ^a   Meier, A ^a  

^a RHEINMAIN UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Mechanical capacitive vacuum gauge; MEMS vacuum gauges; Micro Pirani gauge; Micromachining; Microspinning rotor gauge; Resonant vacuum micro gauge

Indexed keywords

DEPOSITION; ETCHING; HEAT TRANSFER; MEMS; MICROFABRICATION; MICROMACHINING; MICROSTRUCTURE; THIN FILMS;

MECHANICAL CAPACITIVE VACUUM GAUGES; MEMS VACUUM GAUGES; MICRO PIRANI GAUGES; MICROSPINNING ROTOR GAUGES; RESONANT VACUUM MICRO GAUGES;

VACUUM GAGES;

EID: 35548953612     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.08.001     Document Type: Article

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