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Journal of Crystal Growth

Volumn 311, Issue 10, 2009, Pages 2831-2833

Low-pressure HVPE growth of crack-free thick AlN on a trench-patterned AlN template

(5) Katagiri, Yusuke a Kishino, Shinya a Okuura, Kazuki a Miyake, Hideto a Hiramatu, Kazumasa a

a MIE UNIVERSITY (Japan)

Author keywords

A1. Crack free; A3. LP HVPE; B1. AlN

Indexed keywords

A1. CRACK-FREE; A3. LP-HVPE; ALN; ALN LAYERS; ALN-LAYER GROWN; ATOMIC STEP; B1. ALN; CRACK FREE; HYDRIDE VAPOR PHASE EPITAXY; PRESSSURE; ROOT MEAN SQUARE ROUGHNESS; SMOOTH SURFACE; X RAY ROCKING CURVE;

ATOMIC FORCE MICROSCOPY; ATOMS; CRYSTAL GROWTH;

CRACKS;

EID: 65749097863 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/j.jcrysgro.2009.01.022 Document Type: Article

Times cited : (52)

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