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Volumn 44, Issue 16-19, 2005, Pages

Growth of thick AlN layer by hydride vapor phase epitaxy

Author keywords

AlN; Carrier gas; Growth temperature; HVPE; Hydride vapor phase epitaxy

Indexed keywords

ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; FILM GROWTH; HIGH TEMPERATURE EFFECTS; THICK FILMS; VAPOR PHASE EPITAXY;

ALN; CARRIER GAS; GROWTH TEMPERATURE;

CRYSTAL GROWTH;

EID: 30544445804 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.44.L505 Document Type: Article

Times cited : (39)

References (11)

1
- 0036374083
- T. Shibata, K. Asai, T. Nagai, S. Sumiya, M. Tanaka, O. Oda, H. Miyake and K. Hiramatsu: Mater. Res. Soc. Symp. Proc. 693 (2002) 541, 19.3.
- (2002) Mater. Res. Soc. Symp. Proc. , vol.693 , pp. 541
- Shibata, T.¹ Asai, K.² Nagai, T.³ Sumiya, S.⁴ Tanaka, M.⁵ Oda, O.⁶ Miyake, H.⁷ Hiramatsu, K.⁸

2
- 17444406359
- Q. Paduano and D. Weyburne: Jpn. J. Appl. Phys. 44 (2005) L150.
- (2005) Jpn. J. Appl. Phys. , vol.44
- Paduano, Q.¹ Weyburne, D.²

3
- 0036609494
- R. Schiesser, R. Dalmau and Z. Sitar: J. Cryst. Growth 241 (2002) 416.
- (2002) J. Cryst. Growth , vol.241 , pp. 416
- Schiesser, R.¹ Dalmau, R.² Sitar, Z.³

4
- 0002008182
- D. I. Florescu, V. M. Asnin and F. H. Pollak: Compound Semicond. 7 (2001) 62.
- (2001) Compound Semicond. , vol.7 , pp. 62
- Florescu, D.I.¹ Asnin, V.M.² Pollak, F.H.³

5
- 0037509966
- Y. Ohima, T. Eri, M. Shibata, H. Sunakawa, K. Kobayashi, T. Ichihashi and A. Usui: Jpn. J. Appl. Phys. 42 (2003) L1.
- (2003) Jpn. J. Appl. Phys. , vol.42
- Ohima, Y.¹ Eri, T.² Shibata, M.³ Sunakawa, H.⁴ Kobayashi, K.⁵ Ichihashi, T.⁶ Usui, A.⁷

6
- 84875115895
- Y. Kumagai, T. Yamane, T. miyaji, H. Murakami, Y. Kanagawa and A. Koukitu: Phys. Status Solidi C 0 (2003) 2498.
- (2003) Phys. Status Solidi C , pp. 2498
- Kumagai, Y.¹ Yamane, T.² Miyaji, T.³ Murakami, H.⁴ Kanagawa, Y.⁵ Koukitu, A.⁶

7
- 20744441036
- O. Yu. Ledyaev, A. E. Cherenkov, A. E. Nikolaev, I. P. Nikitina, N. I. Kuznetsov, M. S. Dunaevski, A. N. Titkov and V. A. Dmitriev: Phys. Status Solidi C 0 (2002) 474.
- (2002) Phys. Status Solidi C , pp. 474
- Ledyaev, O.Yu.¹ Cherenkov, A.E.² Nikolaev, A.E.³ Nikitina, I.P.⁴ Kuznetsov, N.I.⁵ Dunaevski, M.S.⁶ Titkov, A.N.⁷ Dmitriev, V.A.⁸

8
- 0348146367
- Yu. Melnik, V. Soukhoveev, V. Ivantsov, V. Sizov, A. Pechnikov, K. Tsvetkov, O. Kovalenkov, V. Dmitriev, A. Nilolaev, N. Kuznetsov, E. Silveira and J. Freitas, Jr.: Phys. Status Solidi A 200 (2003) 22.
- (2003) Phys. Status Solidi A , vol.200 , pp. 22
- Melnik, Yu.¹ Soukhoveev, V.² Ivantsov, V.³ Sizov, V.⁴ Pechnikov, A.⁵ Tsvetkov, K.⁶ Kovalenkov, O.⁷ Dmitriev, V.⁸ Nilolaev, A.⁹ Kuznetsov, N.¹⁰ Silveira, E.¹¹ Freitas Jr., J.¹²

9
- 17444416151
- T. Hashimoto, K. Fujito, K. Samonji, J. S. Speck and S. Nakamura: Jpn. J. Appl. Phys. 44 (2005) 869.
- (2005) Jpn. J. Appl. Phys. , vol.44 , pp. 869
- Hashimoto, T.¹ Fujito, K.² Samonji, K.³ Speck, J.S.⁴ Nakamura, S.⁵

10
- 2342441955
- S. Vezian, F. Natali, F. Semond and J. Massies: Phys. Rev. B 69 (2004) 125329.
- (2004) Phys. Rev. B , vol.69 , pp. 125329
- Vezian, S.¹ Natali, F.² Semond, F.³ Massies, J.⁴

11
- 12244271088
- A. Matsuse, N. Grandjean, B. Damilano and J. Massies: J. Cryst. Growth 274 (2005) 387.
- (2005) J. Cryst. Growth , vol.274 , pp. 387
- Matsuse, A.¹ Grandjean, N.² Damilano, B.³ Massies, J.⁴

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