p-type ZnO films deposited by DC reactive magnetron sputtering at different ammonia concentrations

Materials Letters

Volumn 57, Issue 22-23, 2003, Pages 3311-3314

  Lu, Jianguo ^a   Zhang, Yinzhu ^a   Ye, Zhizhen ^a   Wang, Lei ^a   Zhao, Binghui ^a   Huang, Jinhyun ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Crystal structure; DC magnetron reactive sputtering; Epitaxial growth; p type conduction; Semiconductors; Zinc oxide films

Indexed keywords

AMMONIA; CARRIER CONCENTRATION; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; POLYCRYSTALS;

ZINC POLYCRYSTAL FILMS;

ZINC OXIDE;

EID: 0037804205     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(03)00054-5     Document Type: Article

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