Review on material properties of IZO thin films useful as epi-n-TCOs in opto-electronic (SIS solar cells, polymeric LEDs) devices

Materials Science and Engineering: B

Volumn 126, Issue 1, 2006, Pages 1-15

  Ramamoorthy, K ^a   Kumar, K ^a   Chandramohan, R ^b   Sankaranarayanan, K ^a  

^a ALAGAPPA UNIVERSITY   (India)

^b Sree Sevugan Annamalai College   (India)

Author keywords

Anti reflective coatings; Epitaxial growth; Optical windows; Semiconductors; Solar cells; Thin films

Indexed keywords

ANTIREFLECTION COATINGS; EPITAXIAL GROWTH; INDIUM COMPOUNDS; LIGHT EMITTING DIODES; MATERIALS SCIENCE; OPTOELECTRONIC DEVICES; SOLAR CELLS; TRANSPORT PROPERTIES;

INDIUM ZINC OXIDE (IZO); OPTICAL WINDOWS;

THIN FILMS;

EID: 27944486104     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2005.08.117     Document Type: Review

References (135)

1. T. Minami MRS Bull. August 2000 38 44
2. K.L. Chopra, S. Major, and D.K. Pandia Thin Solid Films 102 1 1983 1
3. A.L. Dawar, and J.C. Joshi J. Mater. Sci. 19 1984 1
4. K. Yanagawa, Y. Ohki, T. Omata, H. Hosono, N. Useda, and H. Kawazoe Appl. Phys. Lett. 65 1994 406
5. M. Hiramatsu, K. Imeada, N. Horaio, and M. Nawata J. Vac. Sci. Technol. A. 16 1998 669
6. T. Minami, T. Yamamoto, and T. Miyata Thin Solid Films 366 2000 63
7. Y. Yan, S.J. Pennycook, J. Dai, R.P.H. Chang, A. Wang, and T.J. Marks Appl. Phys. Lett. 73 1998 2585
8. A.E. Delahoy, and M. Cherny MRS Symp. Proc. 426 1996 467 477
9. B.G. Lewis, and D.C. Paine MRS Bull. August 2000 22 27
10. R.G. Gordan MRS Bull. August 2000 52 57
11. D.S. Ginley, and C. Bright MRS Bull. August 2000 15 18
12. T.J. Coutts, D.L. Young, and X. Li MRS Bull. August 2000 58 65
13. X.W. Sun, and H.S. Kwok J. Appl. Phys. 86 1999 408
14. J.C. Manifacier Thin Solid Films 90 1982 297
15. C. Eberspacher, A.L.F. brush, and R.H. Bube Thin Solid Films 136 1986 1
16. D.K. Schroder Semiconductor Material and Device Characterization 1990 John Wiley & Sons New York p. 466
17. J.J. Loferski J. Appl. Phys. 27 7 1956 781
18. A. Suzuki, T. Matsushita, T. Aoki, Y. Yoneyama, and M. Okada Jpn. J. Appl. Phys. 38 1999 L71 L73
19. R.G. Gordon Mat. Res. Soc. Symp. Proc. 426 1996
20. J. Ma, F. Ji, H.-l. Ma, and S.-Y. Li Solar Energy Mater. Solar Cell. 60 2000 341
21. Z.C. Jin, I. Hamberg, and C.G. Granqiost J. Appl. Phys. 64 10, 15 1988 5117 5122
22. S. Major, A. Banerjee, and K.L. Chopra Thin Solid Films 122 1984 31
23. M.B. Bever Encyclopedia of Material Science and Engineering 1986 Pergamon Press New York pp. 5528-5530
24. A. Maldonado, R. Asomoza, J. Cametass-Ortega, E. Pzironi, R. Hernandez, R. Patino, and O. Solarza-Feria Solar Energy Mater. Solar Cell. 57 1999 332
25. W.W. Wenas, A. Yamada, K. Takahashi, M. Yoshino, and M. Konagai J. Appl. Phys. 70 11 1991 7119
26. V. Craciun Appl. Phys. Lett. 65 23 1994 2963 5
27. Y. Li, G.S. Tompa, S. Liang, C. Gorla, Y. Lu, and J. Doyle J. Vac. Sci. Technol. A 15 3 1997 1062
28. A. Wang, J. Dai, J. Cheng, M.P. Chudzile, T.J. Marks, R.P.H. Chang, and C.R. Kannewurf Appl. Phys. Lett. 73 3 1998 327 20
29. K. Ramamoorthy, C. Sanjeeviraja, M. Jayachandran, K. Sankaranarayanan, P. Bhattacharya, and L.M. Kukreja J. Cryst. Growth 226 2001 281
30. H. Han, J.-Z. Zhang, B.L. Halpern, J.J. Schmitt, and J. del Cueto MRS Symp. Proc. 426 1996 491
31. M. Ritala, T. Asikainen, M. Leskela, and J. Skarp MRS Symp. Proc. 426 1996
32. T. Minami, H. Kumagai, T. Kakamu, S. Takata, and M. Ishii J. Vac. Sci. Technol. A 15 3 1997 1069
33. T. Asikainen, M. Ritala, and M. Leskela J. Electrochem. Soc. 141 1994 3210
34. T. Asikainen, M. Ritala, and M. Leskela J. Electrochem. Soc. 142 1995 3538
35. A. Sanchez-Juarez, A. Tiburcio-silver, and A. Oritz Solar Energy Mater. Solar Cell. 52 1998 301 311
36. I.N. Mihailescu, V.S. Teodorescu, E. Gyorgy, A. Luches, A. Perrone, and M. Martino J. Phys. D: Appl. Phys. 31 1998 2236 2240
37. G.A. Prinz Science 250 1990 1092
38. D.B. Chrisey, and A. Inam MRS Bull. February 1992 37
39. D.H. Lowndes, D.B. Geohegan, A.A. Puretzky, D.P. Norton, and C.M. Rouleau Science 273 16 1996 898
40. C.E. Otis, and R.W. Dreyfus Phys. Rev. Lett. 67 1991 2102
41. E. Bohmer, F. Siebke, B. Rech, C. Beneking, and H. Wagner MRS Symp. Proc. 426 1996 519 524
42. T. Venkatesan, X.D. Wu, A. Inam, and J.B. Wachman Appl. Phys. Lett. 52 1988 1193
43. J.S. Hortwitz, K.S. Grabowski, D.B. Chrisey, and R.E. Leuchtner Appl. Phys. Lett 59 1991 1565
44. H. Schwartz, and H.A. Tourtellootte J. Vac. Sci. Technol. 6 1969 3763
45. N.P. Ong, J. Moyle, J. Bajaj, and J.T. Cheung J. Vac. Sci. Technol. A 5 1987 3079
46. J.T. Cheung, G. Niizawa, J. Moyle, N.P. Ong, B.M. Paine, and T. Vreeland Jr. J. Vac. Sci. Technol. A 4 1986 2086
47. J.T. Cheung, and J. Madden J. Vac. Sci. Technol. B 5 1987 705
48. D. Lubben, S.A. Barnett, K. Suzuki, S. Gorbatikin, and J.E. Greene J. Vac. Sci. Technol. B 3 1985 968
49. H. Sankur, W.J. Bunning, J. DeNatale, and J.F. Flintoff Appl. Phys. Lett. 65 1989 2475
50. G. Koran, A. Gupta, R.J. Baserman, M.I. Lutyche, and R.B. Laibowitz Appl. Phys. Lett. 55 1989 2450
51. R. Singh, and J. Narayan Phys. Rev. B 41 1990 8843
52. G.K. Hubler MRS Bull. February 1992 26 27
53. M.B. Maple MRS Bull. January 1989 20
54. T. Venkatesan, X.D. Wu, R. Muenchausen, and A. Pique MRS Bull. February 1992 55 58
55. J. cheung, and J. Horwitz MRS Bull. February 1992 31 36
56. S. Mohan Advanced Course on Thin Film Processing (Lecture Notes) 1995 Indian Institute of Science Bangalore 560012 p. 1-87
57. K. Thyagarajan, and A.K. Ghatak LASERS: Theory and Applications 1995 Macmillan India Limited Delhi p. 294
58. T. Minami, H. Sato, H. Nanto, and S. Takata Jpn. J. Appl. Phys. 24 1985 10
59. S.J. Chang, Y.K. Su, and Y.P. Shei J. Vac. Sci. Technol. A 13 1995 381
60. J. Keekes, B. Ortener, I. Cerven, J. Jakabovie, and J. Kovae J. Appl. Phys. 80 1996 6204
61. V. Craciun, J. Elders, J. Gardeniers, J. Geretovsky, and I.W. Boyd Thin Solid Films 59 1995 1
62. V. Craciun, J. Elders, J. Gardeniers, and L.W. Boyd Appl. Phys. Lett. 65 23 1994 2963 2965
63. J.M. Phillips MRS Bull. April 1995 35 39
64. A.Y. Cho MRS Bull. April 1995 21 28
65. A.J. Freeman, K.R. Poeppelmeier, T.O. Mason, R.P.H. Chang, and T.J. Marks MRS Bull. August 2000 45 51
66. A. Ohtomo, M. Kawasaki, I. Ohkubo, H. Koinuma, T. Yasuda, and Y. Segawa Appl. Phys. Lett. 75 1999 980
67. V. Raghavan Materials Science and Engineering. third ed. 1996 Prentice-Hall of India Pvt. Ltd. New Delhi pp. 1-7
68. K. Ramamoorthy, C. Sanjeeviraja, M. Jeyachandran, K. Sankaranarayanan, P. Misrac, and L.M. Kukreja Mater. Chem. Phys. 84 2004 14 19
69. K. Ramamoorthy Mater. Chem. Phys. 84 1 2004 14 19
70. T. Minami, S. Takata, T. Kakumu, and H. Sonohara Thin Solid Films 270 1995 22 26
71. S. Major, A. Banerjee, K.L. Chopra, and K.C. Nagpal Thin Solid Films 143 1986 19 30
72. R. Wang, L.L.H. King, and A.W. Sleight J. Mater. Res. 11 7 1996 1659 1664
73. S.-Y. Matsuno, M. Kuba, T. Nayuki, S. Soga, and P.W.T. Yuen Rigaku J. 17 2 2000 36 44
74. R.D. Vispute Appl. Phys. Lett. 73 3 1998 348 350
75. X. Wang J. Cryst. Growth 171 1997 410
76. T. Fukunaka, T. Matsui, and S.-Y. Matsuno J. Mater. Res. 14 1999 39
77. T. Minami, T. kakumu, Y. Takada, and S. Takata Thin Solid Films 290-291 1996 1 5
78. B.D. Cullity Elements of X-ray diffraction 1978 Addition-Wesley Publishing Company Inc. pp. 15-50
79. J.A. Anna selvan, H. Keppner, and A. Shah MRS Symp. Proc. 426 1996 496
80. F.J. Bueche Introduction to Physics for Scientists and Engineers 1986 McGraw Hill Book Company New York p. 271
81. J.M. Blocher J. Vac. Sci. Technol. 11 1974 680
82. K. Ramamoorthy, C. Sanjeeviraja, M. Jeyachandran, K. Sankaranarayanan, P. Misra, L.M. Kukreja, Mater. Sci. Semicond. Process., in press.
83. T. Minami, T. Kakamu, and S. Tanaka J. Vac. Sci. Technol. A 14 1996 1704
84. X. Wu, T.J. Coutts, and W.P. Mulligan J. Vac. Sci. Technol. A 15 1997 1057
85. K. Ramamoorthy, C. Sanjeeviraja, M. Jeyachandran, K. Sankaranarayanan, V. Ganesan, P. Misrac, and L.M. Kukreja Mater. Sci. Semicond. Process. 8 2005 555 563
86. K. Ramamoorthy Surf. Eng. 20 3 2004 1 6
87. A. Beiser Concepts of Modern Physics fourth ed. 1987 McGraw-Hill Inc. New York pp. 356-361
88. K. Ramamoorthy, C. Sanjeeviraja, K. Sankaranarayanan, P. Misra, L.M. Kukreja, in: Proceedings of the Fifteenth American Conference on Crystal Growth and Epitaxy (ACCGE-15) Combined with the Eleventh Biennial Workshop on OMV PE and the Third International Symposium on Laser and NLO Materials, 20-24 July 2003, Keystone, USA (poster presentation; Abstract ID 643).
89. P. Santhanaraghavan, and P. Ramasamy Crystal Growth Process. Methods first ed. 2003 KRU Publications Kumbakonam p. 278
90. K. Ramamoorthy, C. Sanjeeviraja, M. Jayachandran, K. Sankaranarayanan, P. Misra, L.M. Kukreja, Opt. Commun. (under review)
91. K. Ramamoorthy et al., J. Phys. D: Appl. Phys., submitted for publication.
92. A. Tiburcio-silver, A. Sanchez-Juarez, and A. Avila-Garcia Solar Energy Mater. Solar Cell. 52 1998 3 10
93. J. Mimila-Arroya, J.A. Reynosa, E. Saucedo, and J.C. Bourgoin J. Cryst. Growth 68 1984 671
94. K.L. Chopra, S. Major, and D.K. Pandya Thin Solid Films 102 1983 1
95. A. Sanchez-Juarez, A. Tiburcio-silver, A. Oritz, E.P. Zironov, and J. Rickards Thin Solid Films 333 1998 196 202
96. A. Suzuki, T. Matsushita, T. Aoki, Y. Yoneyama, and M. Okuda Jpn. J. Appl. Phys. 35 1996 L1603 L1604
97. K.L. Chopra, and S.R. Das Thin Film Solar Cells 1983 Plenum Press New York
98. B. Cockayne, and D.W. Jones Modern Oxide Materials 1972 Academic Press New York p. 131
99. T. Mimami, H. Nanto, and S. Takata Jpn. J. Appl. Phys. 23 1984 5
100. R. Konishi, K. Noda, H. Harada, and H. Sasakura J. Cryst. Growth 117 1992 939
101. B.H. Choi, and H.B. Im J. Am. Ceram. Soc. 73 1990 1347
102. D.J. Goyal, C. Agasthe, M.G. Takwale, V. Bhide, S. Mahamuni, and S.K. Kulkarni J. Mater. Res. 8 1993 1052
103. K. Ramamoorthy, M. Jayachandran, K. Sankaranarayanana, P. Misrac, L.M. Kukrejac, C. Sanjeeviraja, Smart Mater. Struct. (under revision)
104. K.Ramamoorthy et al., Smart Mater. Struct. (under revision).
105. S.K. Narayanadass, and D. Mangalraj Thin Film Characterization and Application 1996 Allied Publishers New Delhi
106. D.C. Wong Mater. Res. Soc. Symp. Proc. 426 1996 503 511
107. L.J. Van der pauw Philips Res. Rep. 13 1958 1
108. S.N. Qiu, C.X. Qiu, and I. Shih Mater. Lett. 5 7 1987 263 268
109. W.C. Sinke MRS Bull. October 1993 18 20
110. K. Ramamoorthy, C. Sanjeeviraja, K. Sankaranarayanan, P. Misra, L.M. Kukreja, in: The International Conference on Energy and Environmental Technologies for Sustainable Development (ICEET-2003), 8-10 October 2003, Malaviya National Institute of Technology, Jaipur, India
111. K. Ramamoorthy Solar Energy 77 2 2004 193 201
112. K.S. Shree harsha, K.J. Bachman, P.H. Schmidt, E.G. Spencer, and F.A. Thiel Appl. Phys. Lett. 30 12 1977 645 646
113. F.A. Thiel, D.D. Bacon, E. Buechler, and K.J. Bachman J. Electrochem. Soc. 124 1997 5
114. J.L. Shay, S. Wagner, R.W. Epworth, K.J. Bachmann, and E. Buehler J. Appl. Phys. 48 11 1977 4853 4855
115. A.G. Milnes, and D.L. Feucht Heterojunctions and Metal-Semiconductor Junction 1972 Academic Press New York 1-206
116. M.A. Green Solar Cells - Operating Principles Technology and System Applications 1982 Prentice-Hall Inc. Englewood cliffs, USA pp. 15-45
117. R.K. Kotnala, and N.P. Singh Essentials of Solar Cell 1986 Allied Publishers Pvt. Ltd. New Delhi pp. 59-96
118. T. Bhattacharya Terrestrial Solar Photo Voltaics 1998 Narosa Publishing House Pvt. Ltd. New Delhi pp. 1-256
119. K.K. Ng Complete Guide to Semi-conductor Devices 1995 Mc-Graw Hill Inc. New York p.474-480
120. G. Willeke, and G. Grassi Proceedings of the First Contractors Meeting on Photo Voltaic Power Generation, Brussels, vol. 1 18 April 1986 17 193
121. O.S. Heavens Optical Properties of Thin Solid Films 1965 Prentice-Hall Publishing Ltd. p. 58
122. T. Fukumura, H. Toyosaki, and Y. Yamada Semicond. Sci. Technol. 20 2005 S103
123. T. Kamiya, and H. Hosono Semicond. Sci. Technol. 20 2005 S92
124. T. Makino, Y. Segawa, M. Kawasaki, and H. Koinu Semicond. Sci. Technol. 20 2005 S78
125. F. Chichibu, A. Uedono, A. Tsukazakai, T. Onuma, M. Zamfirescu, A. Ohtomo, A. Kavokin, G. Cantwell, C.W. Litton, T. Sota, and M. Kawasaki Semicond. Sci. Technol. 20 2005 S67
126. B.K. Meyer, J. Sann, D.M. Hofmann, C. Neumann, and A. Zeuner Semicond. Sci. Technol. 20 2005 S62
127. D.C. Look Semicond. Sci. Technol. 20 2005 S55
128. T. Minami Semicond. Sci. Technol. 20 2005 S35
129. G.-C. Yi, Wang F. C., and W. Park II. Semicond. Sci. Technol. 20 2005 S22
130. M.W. Cho, A. Setiawan, H.J. Ko, S.K. Hong, and T. Yao Semicond. Sci. Technol. 20 2005 S13
131. F.Y. Yamada, H. Toyosaki, T. Hasegawa, H. Koinuma, and M. Kawasaki Appl. Surf. Sci. 223 2004 62
132. S.J. Pearton, W.H. Heo, M. Ivill, D.P. Norton, and T. Steiner Semicond. Sci. Technol. 19 2004 R59
133. Y.W. Heo, D.P. Norton, L.C. Tien, Y. Kwon, B.S. Kang, F. Ren, S.J. Pearton, and J.R. LaRoche Mater. Sci. Eng. R 47 2004 1
134. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner Prog. Mater. Sci. 50 2005 293
135. Z.L. Wang Mater. Today 7 2004 26