Properties of indium tin oxide films deposited on unheated polymer substrates by ion beam assisted deposition

Thin Solid Films

Volumn 517, Issue 18, 2009, Pages 5395-5398

  Zhinong, Yu ^a   Yuqiong, Li ^a   Fan, Xia ^a   Zhiwei, Zhao ^a   Wei, Xue ^a  

^a BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Bending behavior; Buffer layer; Electrical properties and measurements; Indium tin oxide; Ion beam assisted deposition; Optical properties; Plastic substrate

Indexed keywords

BENDING BEHAVIOR; BENDING CYCLES; BENDING RADIUS; CRYSTALLINITY; ELECTRICAL AND MECHANICAL PROPERTIES; ELECTRICAL PROPERTIES AND MEASUREMENTS; ELECTRICAL RESISTIVITY; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; ITO FILMS; PET SUBSTRATE; PLASTIC SUBSTRATE; POLYMER SUBSTRATE; RESISTANCE STABILITY; ROOM TEMPERATURE; SILICON DIOXIDE;

BEAM PLASMA INTERACTIONS; BUFFER LAYERS; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; INDIUM; ION BEAM ASSISTED DEPOSITION; ION BEAMS; ION BOMBARDMENT; IONS; MECHANICAL PROPERTIES; OPTICAL PROPERTIES; ORGANIC LIGHT EMITTING DIODES (OLED); PHOTOLITHOGRAPHY; PLASTIC COATINGS; POLYETHYLENE TEREPHTHALATES; POLYMER FILMS; SILICA; SILICON OXIDES; SUBSTRATES; THERMOPLASTICS; TIN;

OXIDE FILMS;

EID: 65649104117     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.12.057     Document Type: Article

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