메뉴 건너뛰기




Volumn 36, Issue 8, 1997, Pages 2335-2340

Annealing effects on the properties of indium tin oxide films coated on soda lime glasses with a barrier layer of TiO2-SiO2 composite films

Author keywords

Indium tin oxide (ITO); Ion assisted electron beam evaporation; Liquid crystal display LCD; Soda lime glass; Structural, optical and electrical properties

Indexed keywords


EID: 0000596997     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601461     Document Type: Article
Times cited : (14)

References (12)
  • 1
    • 84975661829 scopus 로고
    • Transparent, conducting indium tin oxide films formed on low or medium temperature substrates by ion-assisted deposition
    • J. A. Doborwolski, F. C. Ho, D. Menagh, R. Simpson, and A. Waldorf, "Transparent, conducting indium tin oxide films formed on low or medium temperature substrates by ion-assisted deposition," Appl. Opt. 26, 5204-5210 (1987).
    • (1987) Appl. Opt. , vol.26 , pp. 5204-5210
    • Doborwolski, J.A.1    Ho, F.C.2    Menagh, D.3    Simpson, R.4    Waldorf, A.5
  • 2
    • 0027577032 scopus 로고
    • Large scale and low resistance ITO films formed at high deposition rates
    • K. Suzuki, N. Hashimoto, T. Oyama, J. Shimizu, and H. Kojima, "Large scale and low resistance ITO films formed at high deposition rates," Thin Solid Films 226, 104-109 (1993).
    • (1993) Thin Solid Films , vol.226 , pp. 104-109
    • Suzuki, K.1    Hashimoto, N.2    Oyama, T.3    Shimizu, J.4    Kojima, H.5
  • 3
    • 0024640718 scopus 로고
    • Effects of annealing temperature on microstructure and electrical and optical properties of radio-frequency-sputtered tin-doped indium oxide films
    • J.-G. Na, Y.-R. Cho, Y.-H. Kim, T.-D. Lee, and S.-J. Park, "Effects of annealing temperature on microstructure and electrical and optical properties of radio-frequency-sputtered tin-doped indium oxide films," J. Am. Ceram. Soc. 72(4), 698-701 (1989).
    • (1989) J. Am. Ceram. Soc. , vol.72 , Issue.4 , pp. 698-701
    • Na, J.-G.1    Cho, Y.-R.2    Kim, Y.-H.3    Lee, T.-D.4    Park, S.-J.5
  • 5
    • 0027224790 scopus 로고
    • Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering
    • T. Karasawa and Y. Miyata, "Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering," Thin Solid Films 223, 135-139 (1993).
    • (1993) Thin Solid Films , vol.223 , pp. 135-139
    • Karasawa, T.1    Miyata, Y.2
  • 6
    • 0019317962 scopus 로고
    • Sprayed films of indium tin oxide and fluorine-doped tin oxide of large surface area
    • R. Pommier, C. Gril, and J. Marucchi, "Sprayed films of indium tin oxide and fluorine-doped tin oxide of large surface area," Thin Solid Films 77, 91-97 (1981).
    • (1981) Thin Solid Films , vol.77 , pp. 91-97
    • Pommier, R.1    Gril, C.2    Marucchi, J.3
  • 7
    • 0016545858 scopus 로고
    • Chemical vapor deposition of transparent electrically conducting layers of indium oxide doped with tin
    • J. Kane, H. P. Schweizer, and W. Kern, "Chemical vapor deposition of transparent electrically conducting layers of indium oxide doped with tin," Thin Solid Films 29, 155-163 (1975).
    • (1975) Thin Solid Films , vol.29 , pp. 155-163
    • Kane, J.1    Schweizer, H.P.2    Kern, W.3
  • 9
    • 0029542269 scopus 로고
    • Influence of the deposition rate on the microstructure and hardness of composite films prepared by reactive ion-assisted coevaporation
    • R.-Y. Tsai, M.-Y. Hua, and F. C. Ho, "Influence of the deposition rate on the microstructure and hardness of composite films prepared by reactive ion-assisted coevaporation," Opt. Eng. 34, 3075-3082 (1995).
    • (1995) Opt. Eng. , vol.34 , pp. 3075-3082
    • Tsai, R.-Y.1    Hua, M.-Y.2    Ho, F.C.3
  • 11
    • 0000857569 scopus 로고
    • Crystallization and diffusion in composite thin films
    • H. Sankur and W. Gunning, "Crystallization and diffusion in composite thin films," J. Appl. Phys. 66(10), 4747-4751 (1989).
    • (1989) J. Appl. Phys. , vol.66 , Issue.10 , pp. 4747-4751
    • Sankur, H.1    Gunning, W.2
  • 12
    • 0005345529 scopus 로고
    • Composite films prepared by plasma-IAD for design and fabrication of antireflection coatings in visible and near-infrared spectral regions
    • R.-Y. Tsai and F. C. Ho, "Composite films prepared by plasma-IAD for design and fabrication of antireflection coatings in visible and near-infrared spectral regions," Proc. SPIE 2253, 911-920 (1994).
    • (1994) Proc. SPIE , vol.2253 , pp. 911-920
    • Tsai, R.-Y.1    Ho, F.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.