Effects of air annealing on the optical, electrical, and structural properties of indium-tin oxide thin films

Thin Solid Films

Volumn 517, Issue 16, 2009, Pages 4615-4620

  Trejo Cruz, C ^a   Mendoza Galvan A ^a   Lopez Beltran A M ^a,b   Gracia Jimenez M ^c  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

^b UNIVERSIDAD AUTÓNOMA DE SINALOA   (Mexico)

^c BENEMÉRITA UNIVERSIDAD AUTÓNOMA DE PUEBLA   (Mexico)

Author keywords

Ellipsometry; Indium tin oxide; Optical properties; Resistivity

Indexed keywords

AIR-ANNEALING; ANNEALING TEMPERATURES; DIFFRACTION PEAKS; ELECTRICAL MEASUREMENTS; ELECTRICAL RESISTIVITIES; ELECTRICAL-RESISTIVITY MEASUREMENTS; FILM DEPOSITIONS; INDIUM-TIN OXIDE; INFRARED RANGES; METALLIC BEHAVIORS; NORMAL INCIDENCES; PHOTON ENERGIES; RELATIVE INTENSITIES; RESIDUAL RESISTIVITIES; RESISTIVITY; TRANSMITTANCE SPECTRUM; UV-VISIBLE; X- RAY DIFFRACTIONS;

ANNEALING; DIFFRACTION; ELECTRIC RESISTANCE; INFRARED SPECTROSCOPY; OPTICAL CONSTANTS; OPTICAL PROPERTIES; OXIDE FILMS; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; TIN; TITANIUM COMPOUNDS;

INDIUM;

EID: 65549171145     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.02.134     Document Type: Article

References (21)

1. Brewer S.C., and Franzen S. Chem. Phys. 300 (2004) 285
2. Li Z.Q., and Lin J.J. J. Appl. Phys. 96 (2004) 5918
3. Kim Y.-N., Shin H.G., Song J.K., Cho D.H., Lee H.S., and Jung Y.G. J. Mater. Res. 20 (2005) 1574
4. Mryasov O.N., and Freeman A.J. Phys. Rev., B 64 (2001) 233111
5. Gerfin T., and Grätzel M. J. Appl. Phys. 79 (1996) 1722
6. Woollam J.A., McGahan W.A., and Johns B. Thin Solid Films 241 (1994) 44
7. Synowicki R.A. Thin Solid Films 313-314 (1998) 394
8. Stoica T.F., Gartner M., Lasourdo M., Teodorescu V., Blanchin M., Stoica T., and Zaharescu M. Thin Solid Films 455-456 (2004) 509
9. Ederth J., Johnsson P., Niklasson G.A., Hoel A., Hultåker A., Heszler P., Granqvist C.G., van Doorn A.R., Jongerius M.J., and Burgard D. Phys. Rev., B 68 (2003) 155410
10. Hamberg I., and Granqvist C.G. J. Appl. Phys. 60 (1986) R123
11. Brewer S.H., and Franzen S. J. Phys. Chem., B 106 (2002) 12986
12. Yang C.-H., Lee S.-C., Chen S.-C., and Lin T.-C. Mater. Sci. Eng., B 129 (2006) 154
13. Mohammadi Gheidari A., Behafarid F., Kavei G., and Kazemzad M. Mater. Sci. Eng., B 136 (2007) 37
14. Lin L., Lai F., Qu Y., Gai R., and Huang Z. Mater. Sci. Eng., B 138 (2007) 166
15. Tompkins H.G., and McGahan W.A. Spectroscopic Ellipsometry and Reflectometry: A User's Guide (1999), John Wiley & Sons, New York
16. E. Zawaideh, U. S. Patent No. 5889592, 30 Mar. 1999.
17. Mendoza-Galván A., Vidales-Hurtado M.A., and López-Beltrán A.M. Thin Solid Films 517 10 (2009) 3115
18. Powel R.J., and Spicer W.E. Phys. Rev., B 2 (1969) 2182
19. Zinan J.M. Principles of the Theory of Solids (1972), University Press, Cambridge
20. Minami T. MRS Bull. 25 (2000) 38
21. Kulkarni A.K., and Knickerbocker S.A. J. Vac. Sci. Technol., A 14 (1996) 1709