A new multifunctional platform based on high aspect ratio interdigitated NEMS structures

Nanotechnology

Volumn 20, Issue 17, 2009, Pages

  Ghatnekar Nilsson, S ^a   Karlsson, I ^a   Kvennefors, A ^a,b   Luo, G ^a,b   Zela, V ^a   Arlelid, M ^c   Parker, T ^a   Montelius, L ^b   Litwin, A ^a  

^a NEMS AB   (Sweden)

^b LUND UNIVERSITY   (Sweden)

^c LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-BORNE TARGETS; AMBIENT AIRS; ELECTRONIC CIRCUITS; HIGH ASPECT RATIOS; HIGH FREQUENCIES; HIGH SENSITIVITIES; LOW COMPLEXITY; MASS RESPONSIVITY; MASS SENSORS; MASS-PRODUCIBLE; PATTERNING PROCESS; POLYMER MATERIALS; RESONANT RESPONSE; ROOM TEMPERATURES; SURFACE RELIEF GRATINGS;

ELECTRON TUBES; ELECTRONIC GUIDANCE SYSTEMS; FREQUENCY RESPONSE; NEMS; PHOTORESISTS; PRESSURE DROP; SENSORS;

ASPECT RATIO;

THIOL DERIVATIVE;

ADSORPTION; AMBIENT AIR; ARTICLE; ELECTRONICS; NANOELECTROMECHANICAL SYSTEM; PRIORITY JOURNAL; ROOM TEMPERATURE; SENSOR;

EID: 65549135932     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/17/175502     Document Type: Article

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