CMOS-compatible dual-resonator mems temperature sensor with milli-degree accuracy

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 229-232

  Jha, C M ^a   Bahl, G ^a   Melamud, R ^a   Chandorkar, S A ^a   Hopcroft, M A ^a   Kim, B ^a   Agarwal, M ^a   Salvia, J ^a   Mehta, H ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Beat frequency; Digital temperature sensor; Dual resonator; MEMS; Microresonator

Indexed keywords

ACTUATORS; MICROSYSTEMS; RESONATORS; STABILITY; TEMPERATURE SENSORS; TRANSDUCERS;

BEAT FREQUENCIES; BEAT FREQUENCY; CMOS-COMPATIBLE; DIGITAL TEMPERATURE; DIGITAL TEMPERATURE SENSOR; DUAL RESONATOR; DUAL-RESONATOR DESIGN; EXTERNAL TEMPERATURE; INTERNATIONAL CONFERENCES; MEMS; MICRORESONATOR; SENSOR RESOLUTION; SOLID-STATE SENSORS; TEMPERATURE SENSING; TEMPERATURE-DEPENDENT; THERMAL LAG;

SENSORS;

EID: 50049111151     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300111     Document Type: Conference Paper

References (10)

1. C. T.-C. Nguyen, "MEMS technology for timing and frequency control," Frequency Control Symposium and Exposition, Proceedings of the IEEE International, Aug. 2005.
2. S. S. Schodowski, "Resonator self-temperature sensing" 43rd Annual Symposium on Frequency Control 1989, p.2-7.
3. J. R. Vig, "Temperature insensitive dual mode resonant sensors - a review" IEEE sensors Journal, vol. 1, no. 1, June 2001.
4. J. R. Vig, "Resonators for the microcomputer compensated crystal oscillator," 43rd Annual Symposium on Frequency Control 1989, v.43, p.8-15.
5. R. Melamud, B. Kim, M. A. Hopcroft, S. Chandorkar, M. Agarwal, C. M. Jha, and T. W. Kenny, "Composite flexural-mode resonator with controllable turnover temperature," MEMS, 2007.
6. R.N. Candler, W.-T. Park, H. Li, G.Yama, A. Partridge, M. Lutz, and T.W. Kenny, "Single Wafer encapsulation of MEMS devices," IEEE transactions on advanced packaging, 2003, vol 26, issue 3, pp. 227-232.
7. A. Barzilai, T. VanZandt, and T. W. Kenny, "Technique for the measurement of the noise of a sensor," Rev Sci Instrum 1998, vol. 69, no. 7.
8. J. S. Bendat and A.G. Piersol, Random Data: Analysis and Measurement Procedures, New York, 1971.
9. J. S. Bendat and A.G. Piersol, Engineering Applications of Correlation and Spectral Analysis, New York, 1980.
10. D. A. Howe, D. W. Allan, and J. A. Barnes, "Properties of signal sources and measurement methods," Proceedings of the 35th annual symposium on frequency control, 1981.